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- W2016509912 abstract "Piezoelectric materials (PZ-PT 50-50, PMN-PT 65-35) and electrostrictive materials (PMN- PT 90-10) are potential candidates for the future integrated micro-systems because of their high dielectric constant and elastic modulus. They can be used in a cantilever laminated structure for active vibration control, smart acoustic sensors and agile transducers. The first stage of the study has been made with screen printed thick films: modeling of transfer functions of sensor and actuator is made by analytical methods and experimentation of closed loop regulation is shown on a 15 mm long device. The second stage is the miniaturization of the device on silicon substrate by using sol-gel deposition, microlithography and wet etching. The modeling of a 10 times smaller device is made with data coming from experimental measurements on thin films. Expected deviations and sensitivities are calculated with the same model as above." @default.
- W2016509912 created "2016-06-24" @default.
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- W2016509912 date "1996-04-26" @default.
- W2016509912 modified "2023-09-23" @default.
- W2016509912 title "Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems" @default.
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- W2016509912 doi "https://doi.org/10.1117/12.237025" @default.
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