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- W2016521569 abstract "Abstract The investigation of piezoelectric properties of materials in the thin layer form has become an important task because of the increased range of their applications as actuators and sensors. Pb(Zr, Ti)O3 thin films and the modified compositions have attracted great attention in recent years as promising for use in micro-electro-mechanical systems. The actuator magnitude, is an indirect function of the e31 piezoelectric constant. To determine this constant we use an unusual experimental method. A remanent piezoelectric constant of -4.7 C/m2 was obtained. To show the possible integration of the piezoelectric films in flat silicon ultrasonic micromotors, we have deposited a 3.5 μm thick PZT on square membranes by rf magnetron sputtering. Self polarisation, remanent piezoelectric constant and dielectric permittivity are presented as function of the PZT thickness." @default.
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- W2016521569 date "1999-03-01" @default.
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- W2016521569 title "Remanent piezoelectric constant of PZT thin films" @default.
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- W2016521569 doi "https://doi.org/10.1080/00150199908210581" @default.
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