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- W2016540813 abstract "In this article, a micromachining technique is described which is an improvement to our previous technique. It allows metallic sharp and self-aligned tips to be fabricated for use as a gas detector. The fabrication technique has important advantages which makes it applicable to a wide variety application, in particular gas detection. These include simplicity and a low manufacturing cost. These tips were designed and fabricated with standard IC microfabrication technologies. However, the major highlight and achievement is the use of a low-resolution mask to position sharp tips very close to a second electrode in a simple self-aligned process. The detector exhibits a linear sensitivity response. The minimum-measured sensitivity of the detector, for the selected sample gas (CH<SUB>3</SUB>COOH), is 14 ppm and this was accomplished at a modest operating voltage of only 5 V. The voltage versus measured current of the detector, reveals a exponential behavior which indicates the field ionization to be responsible for detection process." @default.
- W2016540813 created "2016-06-24" @default.
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- W2016540813 date "1998-09-08" @default.
- W2016540813 modified "2023-09-27" @default.
- W2016540813 title "<title>Micromachined gas detector based on self-aligned ionization tips</title>" @default.
- W2016540813 doi "https://doi.org/10.1117/12.323915" @default.
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