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- W2016554156 abstract "The results are presented of local interferometry investigation of the microrelief evolution of silicon surface under the high power laser pulsed effect (Ppulse approximately equals 1 J, (lambda) equals 1.06 micrometers , (tau) pulse approximately equals 1.5 msec). It has been shown that the formation of the periodic microrelief is preceded by the excitation and concurrence of surface deformations of various types.© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2016554156 title "<title>Investigation of evolution of microprofile on silicon surface under high-power laser-pulsed effect</title>" @default.
- W2016554156 doi "https://doi.org/10.1117/12.147621" @default.
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