Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016564979> ?p ?o ?g. }
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97
with 100 items per page.
- W2016564979 endingPage "734" @default.
- W2016564979 startingPage "729" @default.
- W2016564979 abstract "A self-consistent analytical model for a time-independent collisional capacitively coupled plasma (CCP) sheath driven by a triple frequency (TF) RF current source is proposed. Sheath parameters are calculated using this model for some standard plasma parameters and are compared with those of a single frequency (SF) and a dual frequency (DF) capacitively coupled collisional sheath. This model estimates higher values of sheath width and potential with more oscillating behavior compared with SF and DF sheaths. By proper choice of source frequencies or phase differences in the source currents, it is possible to adjust the ion energy hitting the electrode. Use of TF source is found to facilitate better control upon sheath parameters for collisional CCP." @default.
- W2016564979 created "2016-06-24" @default.
- W2016564979 creator A5019495920 @default.
- W2016564979 creator A5077931950 @default.
- W2016564979 date "2014-03-01" @default.
- W2016564979 modified "2023-10-17" @default.
- W2016564979 title "Analytical Determination of Collisional Sheath Properties for Triple Frequency Capacitively Coupled Plasma" @default.
- W2016564979 cites W1978578341 @default.
- W2016564979 cites W1988431874 @default.
- W2016564979 cites W1989003705 @default.
- W2016564979 cites W2006634883 @default.
- W2016564979 cites W2013845796 @default.
- W2016564979 cites W2029321872 @default.
- W2016564979 cites W2031688765 @default.
- W2016564979 cites W2032634467 @default.
- W2016564979 cites W2033161205 @default.
- W2016564979 cites W2044798880 @default.
- W2016564979 cites W2046193750 @default.
- W2016564979 cites W2047966468 @default.
- W2016564979 cites W2057540917 @default.
- W2016564979 cites W2059002209 @default.
- W2016564979 cites W2060600644 @default.
- W2016564979 cites W2067990243 @default.
- W2016564979 cites W2070997554 @default.
- W2016564979 cites W2074780645 @default.
- W2016564979 cites W2078078311 @default.
- W2016564979 cites W2081114966 @default.
- W2016564979 cites W2089462227 @default.
- W2016564979 cites W2093522345 @default.
- W2016564979 cites W2094167831 @default.
- W2016564979 cites W2108685526 @default.
- W2016564979 cites W2123143908 @default.
- W2016564979 cites W2131930100 @default.
- W2016564979 cites W2144022251 @default.
- W2016564979 cites W2147092467 @default.
- W2016564979 cites W2171206964 @default.
- W2016564979 doi "https://doi.org/10.1109/tps.2014.2304463" @default.
- W2016564979 hasPublicationYear "2014" @default.
- W2016564979 type Work @default.
- W2016564979 sameAs 2016564979 @default.
- W2016564979 citedByCount "5" @default.
- W2016564979 countsByYear W20165649792017 @default.
- W2016564979 countsByYear W20165649792019 @default.
- W2016564979 countsByYear W20165649792020 @default.
- W2016564979 countsByYear W20165649792021 @default.
- W2016564979 crossrefType "journal-article" @default.
- W2016564979 hasAuthorship W2016564979A5019495920 @default.
- W2016564979 hasAuthorship W2016564979A5077931950 @default.
- W2016564979 hasConcept C105812681 @default.
- W2016564979 hasConcept C119599485 @default.
- W2016564979 hasConcept C121332964 @default.
- W2016564979 hasConcept C127413603 @default.
- W2016564979 hasConcept C145148216 @default.
- W2016564979 hasConcept C148043351 @default.
- W2016564979 hasConcept C184779094 @default.
- W2016564979 hasConcept C192562407 @default.
- W2016564979 hasConcept C62520636 @default.
- W2016564979 hasConcept C68687820 @default.
- W2016564979 hasConcept C74064498 @default.
- W2016564979 hasConcept C82706917 @default.
- W2016564979 hasConcept C95974651 @default.
- W2016564979 hasConcept C97355855 @default.
- W2016564979 hasConceptScore W2016564979C105812681 @default.
- W2016564979 hasConceptScore W2016564979C119599485 @default.
- W2016564979 hasConceptScore W2016564979C121332964 @default.
- W2016564979 hasConceptScore W2016564979C127413603 @default.
- W2016564979 hasConceptScore W2016564979C145148216 @default.
- W2016564979 hasConceptScore W2016564979C148043351 @default.
- W2016564979 hasConceptScore W2016564979C184779094 @default.
- W2016564979 hasConceptScore W2016564979C192562407 @default.
- W2016564979 hasConceptScore W2016564979C62520636 @default.
- W2016564979 hasConceptScore W2016564979C68687820 @default.
- W2016564979 hasConceptScore W2016564979C74064498 @default.
- W2016564979 hasConceptScore W2016564979C82706917 @default.
- W2016564979 hasConceptScore W2016564979C95974651 @default.
- W2016564979 hasConceptScore W2016564979C97355855 @default.
- W2016564979 hasIssue "3" @default.
- W2016564979 hasLocation W20165649791 @default.
- W2016564979 hasOpenAccess W2016564979 @default.
- W2016564979 hasPrimaryLocation W20165649791 @default.
- W2016564979 hasRelatedWork W1986237822 @default.
- W2016564979 hasRelatedWork W2007461699 @default.
- W2016564979 hasRelatedWork W2013557505 @default.
- W2016564979 hasRelatedWork W2016406071 @default.
- W2016564979 hasRelatedWork W2036309773 @default.
- W2016564979 hasRelatedWork W2080442071 @default.
- W2016564979 hasRelatedWork W2136084562 @default.
- W2016564979 hasRelatedWork W3166206513 @default.
- W2016564979 hasRelatedWork W4225156743 @default.
- W2016564979 hasRelatedWork W2019437472 @default.
- W2016564979 hasVolume "42" @default.
- W2016564979 isParatext "false" @default.
- W2016564979 isRetracted "false" @default.
- W2016564979 magId "2016564979" @default.
- W2016564979 workType "article" @default.