Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016650956> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2016650956 endingPage "3332" @default.
- W2016650956 startingPage "3330" @default.
- W2016650956 abstract "The defect microstructure of silicon-on-insulator wafers produced by multiple cycles of oxygen implantation and annealing was studied with transmission electron microscopy. The dominant defects are stacking fault pyramids (SFPs), 30–100 nm wide, located at the upper buried oxide interface at a density of ∼106 cm−2. The defects are produced by the expansion and interaction of narrow stacking fault (NSF) ribbons pinned to residual precipitates in the top silicon layer. Consideration of the energetics of the transformation from a collection of four NSF ribbons to a single SFP indicates that the reaction is energetically favorable below a critical NSF length. Thus small defects are stable as SFPs while large defects are stable as NSF ribbons." @default.
- W2016650956 created "2016-06-24" @default.
- W2016650956 creator A5004048840 @default.
- W2016650956 creator A5049502854 @default.
- W2016650956 creator A5054663819 @default.
- W2016650956 creator A5072339499 @default.
- W2016650956 creator A5076019957 @default.
- W2016650956 date "1993-12-13" @default.
- W2016650956 modified "2023-09-27" @default.
- W2016650956 title "Stacking fault pyramid formation and energetics in silicon‐on‐insulator material formed by multiple cycles of oxygen implantation and annealing" @default.
- W2016650956 cites W1966392930 @default.
- W2016650956 cites W1967252947 @default.
- W2016650956 cites W1968007706 @default.
- W2016650956 cites W2020863813 @default.
- W2016650956 cites W2026890629 @default.
- W2016650956 cites W2052061245 @default.
- W2016650956 cites W2060737251 @default.
- W2016650956 cites W2066183455 @default.
- W2016650956 cites W2125741092 @default.
- W2016650956 doi "https://doi.org/10.1063/1.110191" @default.
- W2016650956 hasPublicationYear "1993" @default.
- W2016650956 type Work @default.
- W2016650956 sameAs 2016650956 @default.
- W2016650956 citedByCount "7" @default.
- W2016650956 countsByYear W20166509562012 @default.
- W2016650956 crossrefType "journal-article" @default.
- W2016650956 hasAuthorship W2016650956A5004048840 @default.
- W2016650956 hasAuthorship W2016650956A5049502854 @default.
- W2016650956 hasAuthorship W2016650956A5054663819 @default.
- W2016650956 hasAuthorship W2016650956A5072339499 @default.
- W2016650956 hasAuthorship W2016650956A5076019957 @default.
- W2016650956 hasConcept C146088050 @default.
- W2016650956 hasConcept C159122135 @default.
- W2016650956 hasConcept C159985019 @default.
- W2016650956 hasConcept C160671074 @default.
- W2016650956 hasConcept C164675345 @default.
- W2016650956 hasConcept C171250308 @default.
- W2016650956 hasConcept C178790620 @default.
- W2016650956 hasConcept C185592680 @default.
- W2016650956 hasConcept C191897082 @default.
- W2016650956 hasConcept C192562407 @default.
- W2016650956 hasConcept C2777855556 @default.
- W2016650956 hasConcept C2778536302 @default.
- W2016650956 hasConcept C2779851234 @default.
- W2016650956 hasConcept C33347731 @default.
- W2016650956 hasConcept C53143962 @default.
- W2016650956 hasConcept C544956773 @default.
- W2016650956 hasConcept C8010536 @default.
- W2016650956 hasConcept C87976508 @default.
- W2016650956 hasConceptScore W2016650956C146088050 @default.
- W2016650956 hasConceptScore W2016650956C159122135 @default.
- W2016650956 hasConceptScore W2016650956C159985019 @default.
- W2016650956 hasConceptScore W2016650956C160671074 @default.
- W2016650956 hasConceptScore W2016650956C164675345 @default.
- W2016650956 hasConceptScore W2016650956C171250308 @default.
- W2016650956 hasConceptScore W2016650956C178790620 @default.
- W2016650956 hasConceptScore W2016650956C185592680 @default.
- W2016650956 hasConceptScore W2016650956C191897082 @default.
- W2016650956 hasConceptScore W2016650956C192562407 @default.
- W2016650956 hasConceptScore W2016650956C2777855556 @default.
- W2016650956 hasConceptScore W2016650956C2778536302 @default.
- W2016650956 hasConceptScore W2016650956C2779851234 @default.
- W2016650956 hasConceptScore W2016650956C33347731 @default.
- W2016650956 hasConceptScore W2016650956C53143962 @default.
- W2016650956 hasConceptScore W2016650956C544956773 @default.
- W2016650956 hasConceptScore W2016650956C8010536 @default.
- W2016650956 hasConceptScore W2016650956C87976508 @default.
- W2016650956 hasIssue "24" @default.
- W2016650956 hasLocation W20166509561 @default.
- W2016650956 hasOpenAccess W2016650956 @default.
- W2016650956 hasPrimaryLocation W20166509561 @default.
- W2016650956 hasRelatedWork W1976018661 @default.
- W2016650956 hasRelatedWork W1995419857 @default.
- W2016650956 hasRelatedWork W1996797780 @default.
- W2016650956 hasRelatedWork W2050569025 @default.
- W2016650956 hasRelatedWork W2058433336 @default.
- W2016650956 hasRelatedWork W2074308425 @default.
- W2016650956 hasRelatedWork W2082249047 @default.
- W2016650956 hasRelatedWork W2127263781 @default.
- W2016650956 hasRelatedWork W2388737115 @default.
- W2016650956 hasRelatedWork W3045659690 @default.
- W2016650956 hasVolume "63" @default.
- W2016650956 isParatext "false" @default.
- W2016650956 isRetracted "false" @default.
- W2016650956 magId "2016650956" @default.
- W2016650956 workType "article" @default.