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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016697130> ?p ?o ?g. }

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• W2016697130 abstract "Organic thin films were deposited by plasma-enhanced chemical vapor deposition, using isopropyl alcohol as a precursor. The pulsed, inductively coupled plasma was characterized with in situ Langmuir probe measurements and mass spectrometry. We identify the key ionized species diffusing to the substrate and offer explanations as to how they are generated. The films were analyzed with X-ray photoelectron spectroscopy. Correlations were observed between the plasma ion mass distributions and the oxidation state of the deposited carbon." @default.
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• W2016697130 date "2002-04-18" @default.
• W2016697130 modified "2023-10-02" @default.
• W2016697130 title "Plasma Polymerization of Thin Films: Correlations between Plasma Chemistry and Thin Film Character" @default.
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• W2016697130 doi "https://doi.org/10.1021/la011566j" @default.
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