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• W2016719410 endingPage "03DD04" @default.
• W2016719410 startingPage "03DD04" @default.
• W2016719410 abstract "The mechanism of highly selective etching by a pulsed-microwave electron-cyclotron-resonance plasma was investigated by analyzing surface-reaction layers formed on nonpatterned poly-Si and SiO 2 samples and gate-patterned samples with a gate width of 32 nm. The samples were etched by using an HBr/O 2 /Ar/CH 4 gas chemistry and varying the duty cycle of the pulsed microwave. The reaction layers, which were revealed as a hydrocarbon layer on a SiBr x O y layer, were analyzed by X-ray photoelectron spectroscopy. The upper layer was a hydrocarbon layer, which protected SiO 2 from ion bombardment and also prevented Br flux from being supplied to the SiO 2 . The lower layer was a SiBr x O y layer, which suppressed the etching of the underlying Si substrate. The formation of the hydrocarbon layer was controlled by the duty cycle of the microwave plasma. Etch stop, which occurred at a low peak-to-peak voltage (wafer bias) of the continuous microwave plasma, was prevented by controlling the thickness of the hydrocarbon layer in the pulsed-microwave plasma. Gate-oxide punch-through, which occurred at a high peak-to-peak voltage of wafer bias in the case of the continuous microwave plasma, was also prevented in the case of the pulsed microwave plasma by forming reaction layers with high C/Br ratio." @default.
• W2016719410 created "2016-06-24" @default.
• W2016719410 creator A5003134855 @default.
• W2016719410 creator A5004197324 @default.
• W2016719410 creator A5087145492 @default.
• W2016719410 creator A5090914081 @default.
• W2016719410 date "2014-03-01" @default.
• W2016719410 modified "2023-10-16" @default.
• W2016719410 title "Surface analysis of polysilicon gate etching by pulsed-microwave plasma" @default.
• W2016719410 cites W1562617726 @default.
• W2016719410 cites W1636082984 @default.
• W2016719410 cites W1967941516 @default.
• W2016719410 cites W1979045303 @default.
• W2016719410 cites W1982130714 @default.
• W2016719410 cites W1986926667 @default.
• W2016719410 cites W1987078635 @default.
• W2016719410 cites W1990345488 @default.
• W2016719410 cites W1991109037 @default.
• W2016719410 cites W1996867043 @default.
• W2016719410 cites W2008653273 @default.
• W2016719410 cites W2023200833 @default.
• W2016719410 cites W2029726623 @default.
• W2016719410 cites W2032043127 @default.
• W2016719410 cites W2051347538 @default.
• W2016719410 cites W2052411671 @default.
• W2016719410 cites W2067161740 @default.
• W2016719410 cites W2082689635 @default.
• W2016719410 cites W2084462162 @default.
• W2016719410 cites W2085090583 @default.
• W2016719410 cites W2088261746 @default.
• W2016719410 cites W2091677304 @default.
• W2016719410 cites W2094529056 @default.
• W2016719410 cites W2545107937 @default.
• W2016719410 doi "https://doi.org/10.7567/jjap.53.03dd04" @default.
• W2016719410 hasPublicationYear "2014" @default.
• W2016719410 type Work @default.
• W2016719410 sameAs 2016719410 @default.
• W2016719410 citedByCount "8" @default.
• W2016719410 countsByYear W20167194102015 @default.
• W2016719410 countsByYear W20167194102016 @default.
• W2016719410 countsByYear W20167194102019 @default.
• W2016719410 countsByYear W20167194102020 @default.
• W2016719410 countsByYear W20167194102021 @default.
• W2016719410 countsByYear W20167194102023 @default.
• W2016719410 crossrefType "journal-article" @default.
• W2016719410 hasAuthorship W2016719410A5003134855 @default.
• W2016719410 hasAuthorship W2016719410A5004197324 @default.
• W2016719410 hasAuthorship W2016719410A5087145492 @default.
• W2016719410 hasAuthorship W2016719410A5090914081 @default.
• W2016719410 hasConcept C100460472 @default.
• W2016719410 hasConcept C107187091 @default.
• W2016719410 hasConcept C111368507 @default.
• W2016719410 hasConcept C113196181 @default.
• W2016719410 hasConcept C119599485 @default.
• W2016719410 hasConcept C121332964 @default.
• W2016719410 hasConcept C127313418 @default.
• W2016719410 hasConcept C127413603 @default.
• W2016719410 hasConcept C130472188 @default.
• W2016719410 hasConcept C145148216 @default.
• W2016719410 hasConcept C160671074 @default.
• W2016719410 hasConcept C165801399 @default.
• W2016719410 hasConcept C171250308 @default.
• W2016719410 hasConcept C175361016 @default.
• W2016719410 hasConcept C175708663 @default.
• W2016719410 hasConcept C178790620 @default.
• W2016719410 hasConcept C185592680 @default.
• W2016719410 hasConcept C188224857 @default.
• W2016719410 hasConcept C192562407 @default.
• W2016719410 hasConcept C199822604 @default.
• W2016719410 hasConcept C2777289219 @default.
• W2016719410 hasConcept C2779227376 @default.
• W2016719410 hasConcept C43617362 @default.
• W2016719410 hasConcept C44838205 @default.
• W2016719410 hasConcept C46141821 @default.
• W2016719410 hasConcept C49040817 @default.
• W2016719410 hasConcept C62520636 @default.
• W2016719410 hasConcept C82706917 @default.
• W2016719410 hasConceptScore W2016719410C100460472 @default.
• W2016719410 hasConceptScore W2016719410C107187091 @default.
• W2016719410 hasConceptScore W2016719410C111368507 @default.
• W2016719410 hasConceptScore W2016719410C113196181 @default.
• W2016719410 hasConceptScore W2016719410C119599485 @default.
• W2016719410 hasConceptScore W2016719410C121332964 @default.
• W2016719410 hasConceptScore W2016719410C127313418 @default.
• W2016719410 hasConceptScore W2016719410C127413603 @default.
• W2016719410 hasConceptScore W2016719410C130472188 @default.
• W2016719410 hasConceptScore W2016719410C145148216 @default.
• W2016719410 hasConceptScore W2016719410C160671074 @default.
• W2016719410 hasConceptScore W2016719410C165801399 @default.
• W2016719410 hasConceptScore W2016719410C171250308 @default.
• W2016719410 hasConceptScore W2016719410C175361016 @default.
• W2016719410 hasConceptScore W2016719410C175708663 @default.
• W2016719410 hasConceptScore W2016719410C178790620 @default.
• W2016719410 hasConceptScore W2016719410C185592680 @default.
• W2016719410 hasConceptScore W2016719410C188224857 @default.
• W2016719410 hasConceptScore W2016719410C192562407 @default.
• W2016719410 hasConceptScore W2016719410C199822604 @default.
• W2016719410 hasConceptScore W2016719410C2777289219 @default.

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