Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016723341> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2016723341 abstract "The current semiconductor resist process requires a clean atmosphere for 193-nm immersion exposure. Processing involving such small dimensions and short wavelengths requires an atmosphere with extremely low concentrations of various amines, as well as ammonia. This clean space is secured by using an ion-exchange type chemical filter. In addition, a variety of organic contaminants cannot be ignored. For example, in the exposure process, siloxane and other low molecular weight compounds are transformed into high molecular weight compounds by short-wavelength light, and cause lens fogging. To deal with these organic compounds, an activated carbon filter has been used. This paper establishes an optimized design theory for an ion exchange filter based on the molecular diameters of targeted amines by examining the adsorption of various types of amines by ion-exchange resin. We verified the adsorption behavior of a chemical filter by considering the actual environment around the wafer, and established a clean environment by using adsorption theory for various types of contaminants." @default.
- W2016723341 created "2016-06-24" @default.
- W2016723341 creator A5016385933 @default.
- W2016723341 creator A5049314507 @default.
- W2016723341 creator A5063943419 @default.
- W2016723341 creator A5067898598 @default.
- W2016723341 creator A5084860054 @default.
- W2016723341 date "2008-03-14" @default.
- W2016723341 modified "2023-09-23" @default.
- W2016723341 title "Molecular contamination control technologies for high volume production in high NA 193-nm lithography (phase II)" @default.
- W2016723341 cites W2042060779 @default.
- W2016723341 cites W2053549188 @default.
- W2016723341 doi "https://doi.org/10.1117/12.771905" @default.
- W2016723341 hasPublicationYear "2008" @default.
- W2016723341 type Work @default.
- W2016723341 sameAs 2016723341 @default.
- W2016723341 citedByCount "0" @default.
- W2016723341 crossrefType "proceedings-article" @default.
- W2016723341 hasAuthorship W2016723341A5016385933 @default.
- W2016723341 hasAuthorship W2016723341A5049314507 @default.
- W2016723341 hasAuthorship W2016723341A5063943419 @default.
- W2016723341 hasAuthorship W2016723341A5067898598 @default.
- W2016723341 hasAuthorship W2016723341A5084860054 @default.
- W2016723341 hasConcept C112570922 @default.
- W2016723341 hasConcept C127413603 @default.
- W2016723341 hasConcept C150394285 @default.
- W2016723341 hasConcept C160671074 @default.
- W2016723341 hasConcept C171250308 @default.
- W2016723341 hasConcept C178790620 @default.
- W2016723341 hasConcept C185592680 @default.
- W2016723341 hasConcept C18903297 @default.
- W2016723341 hasConcept C192562407 @default.
- W2016723341 hasConcept C204223013 @default.
- W2016723341 hasConcept C2779647737 @default.
- W2016723341 hasConcept C28344629 @default.
- W2016723341 hasConcept C42360764 @default.
- W2016723341 hasConcept C49040817 @default.
- W2016723341 hasConcept C86803240 @default.
- W2016723341 hasConceptScore W2016723341C112570922 @default.
- W2016723341 hasConceptScore W2016723341C127413603 @default.
- W2016723341 hasConceptScore W2016723341C150394285 @default.
- W2016723341 hasConceptScore W2016723341C160671074 @default.
- W2016723341 hasConceptScore W2016723341C171250308 @default.
- W2016723341 hasConceptScore W2016723341C178790620 @default.
- W2016723341 hasConceptScore W2016723341C185592680 @default.
- W2016723341 hasConceptScore W2016723341C18903297 @default.
- W2016723341 hasConceptScore W2016723341C192562407 @default.
- W2016723341 hasConceptScore W2016723341C204223013 @default.
- W2016723341 hasConceptScore W2016723341C2779647737 @default.
- W2016723341 hasConceptScore W2016723341C28344629 @default.
- W2016723341 hasConceptScore W2016723341C42360764 @default.
- W2016723341 hasConceptScore W2016723341C49040817 @default.
- W2016723341 hasConceptScore W2016723341C86803240 @default.
- W2016723341 hasLocation W20167233411 @default.
- W2016723341 hasOpenAccess W2016723341 @default.
- W2016723341 hasPrimaryLocation W20167233411 @default.
- W2016723341 hasRelatedWork W1121612172 @default.
- W2016723341 hasRelatedWork W2005781044 @default.
- W2016723341 hasRelatedWork W2056604271 @default.
- W2016723341 hasRelatedWork W2057320328 @default.
- W2016723341 hasRelatedWork W2076257538 @default.
- W2016723341 hasRelatedWork W2123742800 @default.
- W2016723341 hasRelatedWork W2804142955 @default.
- W2016723341 hasRelatedWork W3162166091 @default.
- W2016723341 hasRelatedWork W4293765996 @default.
- W2016723341 hasRelatedWork W4310442503 @default.
- W2016723341 isParatext "false" @default.
- W2016723341 isRetracted "false" @default.
- W2016723341 magId "2016723341" @default.
- W2016723341 workType "article" @default.