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• W2016745654 abstract "Cathodic arc deposition is a unique technology. An arc spot on a cathode generates a plasma consisting of cathode material with a high degree of ionization. The high concentration of ions allows control of film morphology, high adhesion, efficient reactive deposition of compounds and uniform deposition over a variety of shapes. The composition of the alloys is generally retained from source to substrate. Deposition rates cover a wide range from nanometers per minute to tens of micrometers per minute. Many aspects of the technology warrant further study and its applications are only just beginning." @default.
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• W2016745654 date "1986-12-01" @default.
• W2016745654 modified "2023-10-17" @default.
• W2016745654 title "Cathodic arc deposition technology" @default.
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• W2016745654 doi "https://doi.org/10.1016/0257-8972(86)90001-0" @default.
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