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- W2016770142 abstract "A novel laterally driven mechanism is proposed and studied to solve the pull-in problem of electrostatic actuation in MEMS for use in simple Fabry-Perot interferometers (FPI) with a large tuning range. This method is to build electrodes that are not directly opposite to each other, but rather are laterally shifted. Mathematica calculations show that laterally driven beams require a smaller operating voltage than do some other methods, and cover nearly the full travel range. It is also found that driving performance is influenced by the structure's lateral gap. Too small a lateral gap still yields pull-in failure. For excessively large lateral gap, the pull-in function is not effective. Smaller lateral gaps have lower operating voltage, but larger lateral gaps have better operating stability. A test structure consisting of 40 aluminum beams suspended across two poles has been designed and fabricated. Directly below each test beam is located a capacitive test electrode. Next to each test electrode are two lateral driving electrodes. A driving voltage is applied across the aluminum test beams and lateral electrodes, pulling down the beam and causing the capacitance to change between the test beam and test electrode. By measuring this change, the lateral drive method is verified and characterized." @default.
- W2016770142 created "2016-06-24" @default.
- W2016770142 creator A5006818764 @default.
- W2016770142 creator A5029677059 @default.
- W2016770142 creator A5040559991 @default.
- W2016770142 creator A5059804344 @default.
- W2016770142 creator A5060524108 @default.
- W2016770142 date "2006-01-21" @default.
- W2016770142 modified "2023-09-23" @default.
- W2016770142 title "Laterally driven electrostatic actuators with extended travel range" @default.
- W2016770142 doi "https://doi.org/10.1117/12.645380" @default.
- W2016770142 hasPublicationYear "2006" @default.
- W2016770142 type Work @default.
- W2016770142 sameAs 2016770142 @default.
- W2016770142 citedByCount "0" @default.
- W2016770142 crossrefType "proceedings-article" @default.
- W2016770142 hasAuthorship W2016770142A5006818764 @default.
- W2016770142 hasAuthorship W2016770142A5029677059 @default.
- W2016770142 hasAuthorship W2016770142A5040559991 @default.
- W2016770142 hasAuthorship W2016770142A5059804344 @default.
- W2016770142 hasAuthorship W2016770142A5060524108 @default.
- W2016770142 hasConcept C119599485 @default.
- W2016770142 hasConcept C120665830 @default.
- W2016770142 hasConcept C121332964 @default.
- W2016770142 hasConcept C127413603 @default.
- W2016770142 hasConcept C159985019 @default.
- W2016770142 hasConcept C165801399 @default.
- W2016770142 hasConcept C168834538 @default.
- W2016770142 hasConcept C172707124 @default.
- W2016770142 hasConcept C17525397 @default.
- W2016770142 hasConcept C192562407 @default.
- W2016770142 hasConcept C204323151 @default.
- W2016770142 hasConcept C206755178 @default.
- W2016770142 hasConcept C24890656 @default.
- W2016770142 hasConcept C30066665 @default.
- W2016770142 hasConcept C49040817 @default.
- W2016770142 hasConcept C62520636 @default.
- W2016770142 hasConcept C66938386 @default.
- W2016770142 hasConceptScore W2016770142C119599485 @default.
- W2016770142 hasConceptScore W2016770142C120665830 @default.
- W2016770142 hasConceptScore W2016770142C121332964 @default.
- W2016770142 hasConceptScore W2016770142C127413603 @default.
- W2016770142 hasConceptScore W2016770142C159985019 @default.
- W2016770142 hasConceptScore W2016770142C165801399 @default.
- W2016770142 hasConceptScore W2016770142C168834538 @default.
- W2016770142 hasConceptScore W2016770142C172707124 @default.
- W2016770142 hasConceptScore W2016770142C17525397 @default.
- W2016770142 hasConceptScore W2016770142C192562407 @default.
- W2016770142 hasConceptScore W2016770142C204323151 @default.
- W2016770142 hasConceptScore W2016770142C206755178 @default.
- W2016770142 hasConceptScore W2016770142C24890656 @default.
- W2016770142 hasConceptScore W2016770142C30066665 @default.
- W2016770142 hasConceptScore W2016770142C49040817 @default.
- W2016770142 hasConceptScore W2016770142C62520636 @default.
- W2016770142 hasConceptScore W2016770142C66938386 @default.
- W2016770142 hasLocation W20167701421 @default.
- W2016770142 hasOpenAccess W2016770142 @default.
- W2016770142 hasPrimaryLocation W20167701421 @default.
- W2016770142 hasRelatedWork W1573618315 @default.
- W2016770142 hasRelatedWork W1603214613 @default.
- W2016770142 hasRelatedWork W1970479975 @default.
- W2016770142 hasRelatedWork W1987744565 @default.
- W2016770142 hasRelatedWork W2025446950 @default.
- W2016770142 hasRelatedWork W2153913439 @default.
- W2016770142 hasRelatedWork W2160508504 @default.
- W2016770142 hasRelatedWork W2165174883 @default.
- W2016770142 hasRelatedWork W2900221544 @default.
- W2016770142 hasRelatedWork W3021507227 @default.
- W2016770142 isParatext "false" @default.
- W2016770142 isRetracted "false" @default.
- W2016770142 magId "2016770142" @default.
- W2016770142 workType "article" @default.