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• W2016782141 abstract "We simulate, within a sample, the trajectories of the backscattered electrons detected in a scanning electron microscopy with a particular detection geometry. Thus we obtain the depth and lateral distributions, according to the adjustable parameter values, of the detected electrons. Finally, the scanline profile across a chemical edge is drawn. The conditions corresponding to the best lateral resolution are established; we obtain an ultimate resolution of the same order as the beam diameter." @default.
• W2016782141 created "2016-06-24" @default.
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• W2016782141 date "2000-04-01" @default.
• W2016782141 modified "2023-09-24" @default.
• W2016782141 title "The spatial distribution and resolution of coaxial backscattered electrons in SEM, calculated by Monte Carlo simulations" @default.
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• W2016782141 doi "https://doi.org/10.1046/j.1365-2818.2000.00686.x" @default.
• W2016782141 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/10781205" @default.
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