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- W2017007977 abstract "MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability." @default.
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- W2017007977 date "2012-08-01" @default.
- W2017007977 modified "2023-09-30" @default.
- W2017007977 title "Large micromirror array designed and tested for multi-object spectroscopy" @default.
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- W2017007977 doi "https://doi.org/10.1109/omems.2012.6318829" @default.
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