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- W2017016735 abstract "Abstract Barcoding the microworld has become a promising tool for Cell Biology. Individual and subpopulation cell tracking is of great interest to evaluate cell behavoir. Nowadays, many micrometer and even nanometer size silicon 3D structures can be fabricated using microelectronics techniques, i.e., Deep Reactive Ion Etching (DRIE). 3D barcodes reading are less sensitive to the spatial orientation of the code respect to the reader. Therefore, the motivation of this work is to produce small biocompatible barcodes for cell studies that could be freely programmed by controlling the DRIE process parameters." @default.
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- W2017016735 date "2009-09-01" @default.
- W2017016735 modified "2023-09-25" @default.
- W2017016735 title "DRIE based technology for 3D silicon barcodes fabrication" @default.
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- W2017016735 doi "https://doi.org/10.1016/j.proche.2009.07.199" @default.
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