Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017029987> ?p ?o ?g. }
- W2017029987 endingPage "1145" @default.
- W2017029987 startingPage "1143" @default.
- W2017029987 abstract "The surface chemistry of GaAs-oxide removal with an electron cyclotron resonance (ECR) hydrogen plasma has been investigated with x-ray photoelectron spectroscopy. It is found that As oxide is efficiently removed at room temperature, and heating expedites the removal of Ga oxide. Band bending changes during ECR hydrogen-plasma oxide reduction are also discussed." @default.
- W2017029987 created "2016-06-24" @default.
- W2017029987 creator A5002290307 @default.
- W2017029987 creator A5018048422 @default.
- W2017029987 creator A5043283432 @default.
- W2017029987 creator A5046094838 @default.
- W2017029987 creator A5046216024 @default.
- W2017029987 creator A5066198472 @default.
- W2017029987 creator A5071026982 @default.
- W2017029987 date "1991-03-18" @default.
- W2017029987 modified "2023-09-23" @default.
- W2017029987 title "GaAs-oxide removal using an electron cyclotron resonance hydrogen plasma" @default.
- W2017029987 cites W1964327076 @default.
- W2017029987 cites W1964921084 @default.
- W2017029987 cites W1997596432 @default.
- W2017029987 cites W2003674646 @default.
- W2017029987 cites W2022073541 @default.
- W2017029987 cites W2022529881 @default.
- W2017029987 cites W2023340302 @default.
- W2017029987 cites W2027159280 @default.
- W2017029987 cites W2033937487 @default.
- W2017029987 cites W2054166816 @default.
- W2017029987 cites W2062971634 @default.
- W2017029987 cites W2064080853 @default.
- W2017029987 cites W2069141992 @default.
- W2017029987 cites W2081271337 @default.
- W2017029987 cites W2083469933 @default.
- W2017029987 cites W2088489432 @default.
- W2017029987 cites W2094449956 @default.
- W2017029987 cites W3146732660 @default.
- W2017029987 cites W4231878909 @default.
- W2017029987 cites W4365787421 @default.
- W2017029987 doi "https://doi.org/10.1063/1.104397" @default.
- W2017029987 hasPublicationYear "1991" @default.
- W2017029987 type Work @default.
- W2017029987 sameAs 2017029987 @default.
- W2017029987 citedByCount "50" @default.
- W2017029987 countsByYear W20170299872014 @default.
- W2017029987 countsByYear W20170299872021 @default.
- W2017029987 crossrefType "journal-article" @default.
- W2017029987 hasAuthorship W2017029987A5002290307 @default.
- W2017029987 hasAuthorship W2017029987A5018048422 @default.
- W2017029987 hasAuthorship W2017029987A5043283432 @default.
- W2017029987 hasAuthorship W2017029987A5046094838 @default.
- W2017029987 hasAuthorship W2017029987A5046216024 @default.
- W2017029987 hasAuthorship W2017029987A5066198472 @default.
- W2017029987 hasAuthorship W2017029987A5071026982 @default.
- W2017029987 hasConcept C113196181 @default.
- W2017029987 hasConcept C121332964 @default.
- W2017029987 hasConcept C132427895 @default.
- W2017029987 hasConcept C147120987 @default.
- W2017029987 hasConcept C175361016 @default.
- W2017029987 hasConcept C175708663 @default.
- W2017029987 hasConcept C178790620 @default.
- W2017029987 hasConcept C185592680 @default.
- W2017029987 hasConcept C19181183 @default.
- W2017029987 hasConcept C192562407 @default.
- W2017029987 hasConcept C2779851234 @default.
- W2017029987 hasConcept C39527238 @default.
- W2017029987 hasConcept C43617362 @default.
- W2017029987 hasConcept C46141821 @default.
- W2017029987 hasConcept C49040817 @default.
- W2017029987 hasConcept C512968161 @default.
- W2017029987 hasConcept C62520636 @default.
- W2017029987 hasConcept C82706917 @default.
- W2017029987 hasConceptScore W2017029987C113196181 @default.
- W2017029987 hasConceptScore W2017029987C121332964 @default.
- W2017029987 hasConceptScore W2017029987C132427895 @default.
- W2017029987 hasConceptScore W2017029987C147120987 @default.
- W2017029987 hasConceptScore W2017029987C175361016 @default.
- W2017029987 hasConceptScore W2017029987C175708663 @default.
- W2017029987 hasConceptScore W2017029987C178790620 @default.
- W2017029987 hasConceptScore W2017029987C185592680 @default.
- W2017029987 hasConceptScore W2017029987C19181183 @default.
- W2017029987 hasConceptScore W2017029987C192562407 @default.
- W2017029987 hasConceptScore W2017029987C2779851234 @default.
- W2017029987 hasConceptScore W2017029987C39527238 @default.
- W2017029987 hasConceptScore W2017029987C43617362 @default.
- W2017029987 hasConceptScore W2017029987C46141821 @default.
- W2017029987 hasConceptScore W2017029987C49040817 @default.
- W2017029987 hasConceptScore W2017029987C512968161 @default.
- W2017029987 hasConceptScore W2017029987C62520636 @default.
- W2017029987 hasConceptScore W2017029987C82706917 @default.
- W2017029987 hasIssue "11" @default.
- W2017029987 hasLocation W20170299871 @default.
- W2017029987 hasOpenAccess W2017029987 @default.
- W2017029987 hasPrimaryLocation W20170299871 @default.
- W2017029987 hasRelatedWork W1966840740 @default.
- W2017029987 hasRelatedWork W1990648967 @default.
- W2017029987 hasRelatedWork W2017029987 @default.
- W2017029987 hasRelatedWork W2025359739 @default.
- W2017029987 hasRelatedWork W2026988816 @default.
- W2017029987 hasRelatedWork W2028832132 @default.
- W2017029987 hasRelatedWork W2031706053 @default.
- W2017029987 hasRelatedWork W2036162084 @default.
- W2017029987 hasRelatedWork W2043616421 @default.
- W2017029987 hasRelatedWork W2159516354 @default.
- W2017029987 hasVolume "58" @default.