Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017033567> ?p ?o ?g. }
- W2017033567 abstract "Abstract Synthesis of buried insulating layers by ion implantation of oxygen and nitrogen into silicon is reviewed. Relevant concepts of ion implantation are discussed. The effects of various implantation and annealing parameters on the structure and characteristics of insulating layers are analyzed in the light of recent experimental results." @default.
- W2017033567 created "2016-06-24" @default.
- W2017033567 creator A5034663664 @default.
- W2017033567 creator A5076609618 @default.
- W2017033567 date "1992-06-01" @default.
- W2017033567 modified "2023-09-24" @default.
- W2017033567 title "Synthesis of buried insulating layers in silicon by ion implantation" @default.
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