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- W2017052858 endingPage "478" @default.
- W2017052858 startingPage "476" @default.
- W2017052858 abstract "We present results on electron beam exposure of a self‐assembled monolayer film as a self‐developing positive resist on GaAs. A 1.5 nm thick monolayer of n‐octadecanethiol (C18H37SH) deposited on a GaAs (100) substrate showed a electron beam sensitivity of about 100 μC/cm2. The monolayer resist was used as a mask for chemical etching of the GaAs. Patterns in GaAs have been created with widths approximately equal to the exposing electron beam width of 50 nm." @default.
- W2017052858 created "2016-06-24" @default.
- W2017052858 creator A5005630467 @default.
- W2017052858 creator A5029356125 @default.
- W2017052858 creator A5029667207 @default.
- W2017052858 creator A5032114931 @default.
- W2017052858 creator A5050572442 @default.
- W2017052858 creator A5072672667 @default.
- W2017052858 date "1993-02-01" @default.
- W2017052858 modified "2023-10-18" @default.
- W2017052858 title "Self‐assembled monolayer electron beam resist on GaAs" @default.
- W2017052858 cites W1970041600 @default.
- W2017052858 cites W1975913162 @default.
- W2017052858 cites W1986664194 @default.
- W2017052858 cites W1989367423 @default.
- W2017052858 cites W2047048769 @default.
- W2017052858 cites W2069099100 @default.
- W2017052858 cites W2090083857 @default.
- W2017052858 cites W2951016885 @default.
- W2017052858 doi "https://doi.org/10.1063/1.108938" @default.
- W2017052858 hasPublicationYear "1993" @default.
- W2017052858 type Work @default.
- W2017052858 sameAs 2017052858 @default.
- W2017052858 citedByCount "132" @default.
- W2017052858 countsByYear W20170528582012 @default.
- W2017052858 countsByYear W20170528582016 @default.
- W2017052858 countsByYear W20170528582017 @default.
- W2017052858 countsByYear W20170528582020 @default.
- W2017052858 countsByYear W20170528582022 @default.
- W2017052858 countsByYear W20170528582023 @default.
- W2017052858 crossrefType "journal-article" @default.
- W2017052858 hasAuthorship W2017052858A5005630467 @default.
- W2017052858 hasAuthorship W2017052858A5029356125 @default.
- W2017052858 hasAuthorship W2017052858A5029667207 @default.
- W2017052858 hasAuthorship W2017052858A5032114931 @default.
- W2017052858 hasAuthorship W2017052858A5050572442 @default.
- W2017052858 hasAuthorship W2017052858A5072672667 @default.
- W2017052858 hasConcept C100460472 @default.
- W2017052858 hasConcept C111368507 @default.
- W2017052858 hasConcept C121332964 @default.
- W2017052858 hasConcept C127313418 @default.
- W2017052858 hasConcept C136525101 @default.
- W2017052858 hasConcept C142724271 @default.
- W2017052858 hasConcept C147120987 @default.
- W2017052858 hasConcept C162117346 @default.
- W2017052858 hasConcept C171250308 @default.
- W2017052858 hasConcept C192562407 @default.
- W2017052858 hasConcept C200274948 @default.
- W2017052858 hasConcept C204787440 @default.
- W2017052858 hasConcept C2777289219 @default.
- W2017052858 hasConcept C2779227376 @default.
- W2017052858 hasConcept C49040817 @default.
- W2017052858 hasConcept C510052550 @default.
- W2017052858 hasConcept C53524968 @default.
- W2017052858 hasConcept C62520636 @default.
- W2017052858 hasConcept C7070889 @default.
- W2017052858 hasConcept C71924100 @default.
- W2017052858 hasConcept C95312477 @default.
- W2017052858 hasConceptScore W2017052858C100460472 @default.
- W2017052858 hasConceptScore W2017052858C111368507 @default.
- W2017052858 hasConceptScore W2017052858C121332964 @default.
- W2017052858 hasConceptScore W2017052858C127313418 @default.
- W2017052858 hasConceptScore W2017052858C136525101 @default.
- W2017052858 hasConceptScore W2017052858C142724271 @default.
- W2017052858 hasConceptScore W2017052858C147120987 @default.
- W2017052858 hasConceptScore W2017052858C162117346 @default.
- W2017052858 hasConceptScore W2017052858C171250308 @default.
- W2017052858 hasConceptScore W2017052858C192562407 @default.
- W2017052858 hasConceptScore W2017052858C200274948 @default.
- W2017052858 hasConceptScore W2017052858C204787440 @default.
- W2017052858 hasConceptScore W2017052858C2777289219 @default.
- W2017052858 hasConceptScore W2017052858C2779227376 @default.
- W2017052858 hasConceptScore W2017052858C49040817 @default.
- W2017052858 hasConceptScore W2017052858C510052550 @default.
- W2017052858 hasConceptScore W2017052858C53524968 @default.
- W2017052858 hasConceptScore W2017052858C62520636 @default.
- W2017052858 hasConceptScore W2017052858C7070889 @default.
- W2017052858 hasConceptScore W2017052858C71924100 @default.
- W2017052858 hasConceptScore W2017052858C95312477 @default.
- W2017052858 hasIssue "5" @default.
- W2017052858 hasLocation W20170528581 @default.
- W2017052858 hasOpenAccess W2017052858 @default.
- W2017052858 hasPrimaryLocation W20170528581 @default.
- W2017052858 hasRelatedWork W1979069790 @default.
- W2017052858 hasRelatedWork W2038772957 @default.
- W2017052858 hasRelatedWork W2044824382 @default.
- W2017052858 hasRelatedWork W2092404174 @default.
- W2017052858 hasRelatedWork W2102437479 @default.
- W2017052858 hasRelatedWork W2136502888 @default.
- W2017052858 hasRelatedWork W2363150811 @default.
- W2017052858 hasRelatedWork W2495356956 @default.
- W2017052858 hasRelatedWork W2964303512 @default.
- W2017052858 hasRelatedWork W4298206121 @default.
- W2017052858 hasVolume "62" @default.
- W2017052858 isParatext "false" @default.
- W2017052858 isRetracted "false" @default.
- W2017052858 magId "2017052858" @default.
- W2017052858 workType "article" @default.