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- W2017058207 abstract "Abstract The emission of neutral and positively charged silver clusters during sputtering of a polycrystalline silver target by 5 keV Ar+ ion bombardment has been studied and the sputter ejected silver flux has been characterized. While the sputtered ions Agn+ were measured directly using secondary ion mass spectrometry, appropriate postionization techniques (50 eV electron impacttion; two-photon ionization at λ = 248 nm were applied for the simultaneous measurement of the emitted neutral clusters Agn. By the combination of these techniques, the contribution of Agn+ and Agn in the sputter emitted silver flux is determined quantitatively. As a result, the silver flux is found to be strongly dominated by neutral clusters rather than cluster ions (flux ratio: Ag n + Ag n ≤1% for n = 1–4). The contribution of neutral clusters in the overall silver flux decreases rapidly and monotonically with increasing cluster size n and decreases, in addition, with decreasing bombarding energy (≤5 keV) in agreement with a statistical model for the emission of sputtered neutral metal clusters. The well known alternation of the secondary ion intensities of Agn+ as a function of cluster size (higher intensities for odd n) is found to be correlated with the effective “ionization potentials” of the corresponding sputtered neutral clusters, which were additionally measured." @default.
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- W2017058207 date "1992-12-01" @default.
- W2017058207 modified "2023-09-25" @default.
- W2017058207 title "Formation of neutral and positively charged clusters (Agn and Agn+; n≤4) during sputtering of silver" @default.
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- W2017058207 doi "https://doi.org/10.1016/0167-2584(92)90225-t" @default.
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