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- W2017065983 abstract "In this paper, the results of a study of the discharge characteristics of a D.C. plasma etcher are presented for the gases CF 4 and NF 3 . These results emphasize the importance of discharge chemistry. To study the role of CF 3 and F in the etching process, a 0.25 Torr mixture of CF 4 (NF 3 ) and Helium was excited in a D.C. discharge. At low enough power densities such that saturation processes were negligible, a primarily Helium discharge enhanced the 704 nm free fluorine emission over that of a CF discharge through a resonant transfer process, (He*+ CF 4 → He + CF 3 + F**). Even though this line was enhanced by a factor of ∼ 6, the etching process was not affected implying that the products play a small role, if any, in the surface reaction. When the SiO 2 (Si 3 N 4 ) sample was biased to draw net ion current from the plasma, the etch rate was greatly enhanced. Measured ion temperatures were found to be too low ( 3 as the etchant. Significant (> 10x) increases in etch rate were found with NF 3 , apparently because all dissociated components of this medium are gases." @default.
- W2017065983 created "2016-06-24" @default.
- W2017065983 creator A5033996835 @default.
- W2017065983 creator A5042929815 @default.
- W2017065983 creator A5080521324 @default.
- W2017065983 date "1979-01-01" @default.
- W2017065983 modified "2023-09-25" @default.
- W2017065983 title "Discharge aspects involved in plasma etching" @default.
- W2017065983 doi "https://doi.org/10.1109/iedm.1979.189536" @default.
- W2017065983 hasPublicationYear "1979" @default.
- W2017065983 type Work @default.
- W2017065983 sameAs 2017065983 @default.
- W2017065983 citedByCount "0" @default.
- W2017065983 crossrefType "proceedings-article" @default.
- W2017065983 hasAuthorship W2017065983A5033996835 @default.
- W2017065983 hasAuthorship W2017065983A5042929815 @default.
- W2017065983 hasAuthorship W2017065983A5080521324 @default.
- W2017065983 hasConcept C100460472 @default.
- W2017065983 hasConcept C107187091 @default.
- W2017065983 hasConcept C113196181 @default.
- W2017065983 hasConcept C119599485 @default.
- W2017065983 hasConcept C121332964 @default.
- W2017065983 hasConcept C127413603 @default.
- W2017065983 hasConcept C130472188 @default.
- W2017065983 hasConcept C145148216 @default.
- W2017065983 hasConcept C155891486 @default.
- W2017065983 hasConcept C165801399 @default.
- W2017065983 hasConcept C178790620 @default.
- W2017065983 hasConcept C181500209 @default.
- W2017065983 hasConcept C184779094 @default.
- W2017065983 hasConcept C185592680 @default.
- W2017065983 hasConcept C192562407 @default.
- W2017065983 hasConcept C2779227376 @default.
- W2017065983 hasConcept C30646810 @default.
- W2017065983 hasConcept C43617362 @default.
- W2017065983 hasConcept C506198293 @default.
- W2017065983 hasConcept C546029482 @default.
- W2017065983 hasConcept C62520636 @default.
- W2017065983 hasConcept C82706917 @default.
- W2017065983 hasConcept C97355855 @default.
- W2017065983 hasConceptScore W2017065983C100460472 @default.
- W2017065983 hasConceptScore W2017065983C107187091 @default.
- W2017065983 hasConceptScore W2017065983C113196181 @default.
- W2017065983 hasConceptScore W2017065983C119599485 @default.
- W2017065983 hasConceptScore W2017065983C121332964 @default.
- W2017065983 hasConceptScore W2017065983C127413603 @default.
- W2017065983 hasConceptScore W2017065983C130472188 @default.
- W2017065983 hasConceptScore W2017065983C145148216 @default.
- W2017065983 hasConceptScore W2017065983C155891486 @default.
- W2017065983 hasConceptScore W2017065983C165801399 @default.
- W2017065983 hasConceptScore W2017065983C178790620 @default.
- W2017065983 hasConceptScore W2017065983C181500209 @default.
- W2017065983 hasConceptScore W2017065983C184779094 @default.
- W2017065983 hasConceptScore W2017065983C185592680 @default.
- W2017065983 hasConceptScore W2017065983C192562407 @default.
- W2017065983 hasConceptScore W2017065983C2779227376 @default.
- W2017065983 hasConceptScore W2017065983C30646810 @default.
- W2017065983 hasConceptScore W2017065983C43617362 @default.
- W2017065983 hasConceptScore W2017065983C506198293 @default.
- W2017065983 hasConceptScore W2017065983C546029482 @default.
- W2017065983 hasConceptScore W2017065983C62520636 @default.
- W2017065983 hasConceptScore W2017065983C82706917 @default.
- W2017065983 hasConceptScore W2017065983C97355855 @default.
- W2017065983 hasLocation W20170659831 @default.
- W2017065983 hasOpenAccess W2017065983 @default.
- W2017065983 hasPrimaryLocation W20170659831 @default.
- W2017065983 hasRelatedWork W1639208503 @default.
- W2017065983 hasRelatedWork W1971775361 @default.
- W2017065983 hasRelatedWork W1978175199 @default.
- W2017065983 hasRelatedWork W2009742934 @default.
- W2017065983 hasRelatedWork W2026632275 @default.
- W2017065983 hasRelatedWork W2048738879 @default.
- W2017065983 hasRelatedWork W2075869476 @default.
- W2017065983 hasRelatedWork W2080619504 @default.
- W2017065983 hasRelatedWork W2082689635 @default.
- W2017065983 hasRelatedWork W2105391387 @default.
- W2017065983 hasRelatedWork W2109486932 @default.
- W2017065983 hasRelatedWork W2309568540 @default.
- W2017065983 hasRelatedWork W2322371549 @default.
- W2017065983 hasRelatedWork W2418520285 @default.
- W2017065983 hasRelatedWork W2541790846 @default.
- W2017065983 hasRelatedWork W2780472952 @default.
- W2017065983 hasRelatedWork W2898747258 @default.
- W2017065983 hasRelatedWork W2904149736 @default.
- W2017065983 hasRelatedWork W3004541130 @default.
- W2017065983 hasRelatedWork W2139404708 @default.
- W2017065983 isParatext "false" @default.
- W2017065983 isRetracted "false" @default.
- W2017065983 magId "2017065983" @default.
- W2017065983 workType "article" @default.