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- W2017100940 abstract "Most of photomask issues such as pattern collapse, HAZE, and cleaning damage relate to behavior of mask surfaces. Therefore it is coming to be important to control surface energy in photomask processes. Especially adhesion analysis in micro region is strongly desired to optimize material and process designs in photomask fabrication. Quantitative measurements of adhesive forces of resists on photomask blanks were realized with scanning probe microscopy (SPM) techniques. Then surface energy on photomask blanks was able to be controlled by modification with some silanization reagents. In addition, adhesive forces of resists on surfaces modified with some silanes were able to be also controlled. The SPM method is proved to be effective for measuring adhesive energy of micro patterns on photomask blanks." @default.
- W2017100940 created "2016-06-24" @default.
- W2017100940 creator A5005110163 @default.
- W2017100940 creator A5020688961 @default.
- W2017100940 creator A5024260272 @default.
- W2017100940 creator A5026604772 @default.
- W2017100940 creator A5055749083 @default.
- W2017100940 creator A5077380899 @default.
- W2017100940 creator A5088363151 @default.
- W2017100940 creator A5039091884 @default.
- W2017100940 date "2008-05-30" @default.
- W2017100940 modified "2023-09-23" @default.
- W2017100940 title "Surface energy control techniques for photomask fabrication and their characterizations with scanning probe microscopy" @default.
- W2017100940 doi "https://doi.org/10.1117/12.793099" @default.
- W2017100940 hasPublicationYear "2008" @default.
- W2017100940 type Work @default.
- W2017100940 sameAs 2017100940 @default.
- W2017100940 citedByCount "0" @default.
- W2017100940 crossrefType "proceedings-article" @default.
- W2017100940 hasAuthorship W2017100940A5005110163 @default.
- W2017100940 hasAuthorship W2017100940A5020688961 @default.
- W2017100940 hasAuthorship W2017100940A5024260272 @default.
- W2017100940 hasAuthorship W2017100940A5026604772 @default.
- W2017100940 hasAuthorship W2017100940A5039091884 @default.
- W2017100940 hasAuthorship W2017100940A5055749083 @default.
- W2017100940 hasAuthorship W2017100940A5077380899 @default.
- W2017100940 hasAuthorship W2017100940A5088363151 @default.
- W2017100940 hasConcept C136525101 @default.
- W2017100940 hasConcept C142724271 @default.
- W2017100940 hasConcept C14737013 @default.
- W2017100940 hasConcept C159985019 @default.
- W2017100940 hasConcept C171250308 @default.
- W2017100940 hasConcept C192562407 @default.
- W2017100940 hasConcept C195839 @default.
- W2017100940 hasConcept C204787440 @default.
- W2017100940 hasConcept C2779227376 @default.
- W2017100940 hasConcept C2780151546 @default.
- W2017100940 hasConcept C53524968 @default.
- W2017100940 hasConcept C71924100 @default.
- W2017100940 hasConceptScore W2017100940C136525101 @default.
- W2017100940 hasConceptScore W2017100940C142724271 @default.
- W2017100940 hasConceptScore W2017100940C14737013 @default.
- W2017100940 hasConceptScore W2017100940C159985019 @default.
- W2017100940 hasConceptScore W2017100940C171250308 @default.
- W2017100940 hasConceptScore W2017100940C192562407 @default.
- W2017100940 hasConceptScore W2017100940C195839 @default.
- W2017100940 hasConceptScore W2017100940C204787440 @default.
- W2017100940 hasConceptScore W2017100940C2779227376 @default.
- W2017100940 hasConceptScore W2017100940C2780151546 @default.
- W2017100940 hasConceptScore W2017100940C53524968 @default.
- W2017100940 hasConceptScore W2017100940C71924100 @default.
- W2017100940 hasLocation W20171009401 @default.
- W2017100940 hasOpenAccess W2017100940 @default.
- W2017100940 hasPrimaryLocation W20171009401 @default.
- W2017100940 hasRelatedWork W1836286181 @default.
- W2017100940 hasRelatedWork W1969210739 @default.
- W2017100940 hasRelatedWork W1993619127 @default.
- W2017100940 hasRelatedWork W1998240021 @default.
- W2017100940 hasRelatedWork W1999695071 @default.
- W2017100940 hasRelatedWork W2023999549 @default.
- W2017100940 hasRelatedWork W2028542407 @default.
- W2017100940 hasRelatedWork W2036754708 @default.
- W2017100940 hasRelatedWork W2039248714 @default.
- W2017100940 hasRelatedWork W2043992708 @default.
- W2017100940 hasRelatedWork W2079318902 @default.
- W2017100940 hasRelatedWork W2079929139 @default.
- W2017100940 hasRelatedWork W2080283943 @default.
- W2017100940 hasRelatedWork W2081445618 @default.
- W2017100940 hasRelatedWork W2091707863 @default.
- W2017100940 hasRelatedWork W2096692351 @default.
- W2017100940 hasRelatedWork W2106512885 @default.
- W2017100940 hasRelatedWork W2533522926 @default.
- W2017100940 hasRelatedWork W2752587101 @default.
- W2017100940 hasRelatedWork W3212464668 @default.
- W2017100940 isParatext "false" @default.
- W2017100940 isRetracted "false" @default.
- W2017100940 magId "2017100940" @default.
- W2017100940 workType "article" @default.