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• W2017103039 endingPage "246" @default.
• W2017103039 startingPage "242" @default.
• W2017103039 abstract "We report on a study of the compositional and chemical properties of films deposited on silicon by quadrupoled Nd:YAG pulsed laser ablation of a ceramic AlN target. The ablation has been performed either in a vacuum or in the presence of a gas atmosphere. The effect of oxygen incorporation in the films on their chemical structure was investigated. The binding energy of the Al 2p, N 1s and O 1s core electrons indicates the formation of near-stoichiometric aluminum nitride in films grown in a vacuum (10−7–10−5 mbar), whereas in films grown under an oxygen partial pressure of 0.1 mbar, only aluminum oxide formation was observed." @default.
• W2017103039 created "2016-06-24" @default.
• W2017103039 creator A5028147318 @default.
• W2017103039 creator A5050031708 @default.
• W2017103039 creator A5062189858 @default.
• W2017103039 creator A5063021479 @default.
• W2017103039 creator A5082914123 @default.
• W2017103039 creator A5086185440 @default.
• W2017103039 date "1999-12-01" @default.
• W2017103039 modified "2023-09-30" @default.
• W2017103039 title "Chemical structure of films grown by AlN laser ablation: an X-ray photoelectron spectroscopy study" @default.
• W2017103039 cites W1972706892 @default.
• W2017103039 cites W1981218685 @default.
• W2017103039 cites W1983081676 @default.
• W2017103039 cites W1994042826 @default.
• W2017103039 cites W1995737354 @default.
• W2017103039 cites W2027883434 @default.
• W2017103039 cites W2044305361 @default.
• W2017103039 cites W2051422621 @default.
• W2017103039 cites W2057650217 @default.
• W2017103039 cites W2060527643 @default.
• W2017103039 cites W2062569777 @default.
• W2017103039 cites W2080097200 @default.
• W2017103039 cites W2095815466 @default.
• W2017103039 cites W2108478370 @default.
• W2017103039 cites W2015111641 @default.
• W2017103039 doi "https://doi.org/10.1016/s0257-8972(99)00377-1" @default.
• W2017103039 hasPublicationYear "1999" @default.
• W2017103039 type Work @default.
• W2017103039 sameAs 2017103039 @default.
• W2017103039 citedByCount "47" @default.
• W2017103039 countsByYear W20171030392012 @default.
• W2017103039 countsByYear W20171030392013 @default.
• W2017103039 countsByYear W20171030392014 @default.
• W2017103039 countsByYear W20171030392015 @default.
• W2017103039 countsByYear W20171030392016 @default.
• W2017103039 countsByYear W20171030392017 @default.
• W2017103039 countsByYear W20171030392018 @default.
• W2017103039 countsByYear W20171030392019 @default.
• W2017103039 countsByYear W20171030392021 @default.
• W2017103039 countsByYear W20171030392022 @default.
• W2017103039 countsByYear W20171030392023 @default.
• W2017103039 crossrefType "journal-article" @default.
• W2017103039 hasAuthorship W2017103039A5028147318 @default.
• W2017103039 hasAuthorship W2017103039A5050031708 @default.
• W2017103039 hasAuthorship W2017103039A5062189858 @default.
• W2017103039 hasAuthorship W2017103039A5063021479 @default.
• W2017103039 hasAuthorship W2017103039A5082914123 @default.
• W2017103039 hasAuthorship W2017103039A5086185440 @default.
• W2017103039 hasConcept C113196181 @default.
• W2017103039 hasConcept C120665830 @default.
• W2017103039 hasConcept C121332964 @default.
• W2017103039 hasConcept C127413603 @default.
• W2017103039 hasConcept C134132462 @default.
• W2017103039 hasConcept C144082473 @default.
• W2017103039 hasConcept C147789679 @default.
• W2017103039 hasConcept C171250308 @default.
• W2017103039 hasConcept C175708663 @default.
• W2017103039 hasConcept C178790620 @default.
• W2017103039 hasConcept C185592680 @default.
• W2017103039 hasConcept C19067145 @default.
• W2017103039 hasConcept C191897082 @default.
• W2017103039 hasConcept C192562407 @default.
• W2017103039 hasConcept C194760766 @default.
• W2017103039 hasConcept C2777431650 @default.
• W2017103039 hasConcept C2779188808 @default.
• W2017103039 hasConcept C2779227376 @default.
• W2017103039 hasConcept C2779851234 @default.
• W2017103039 hasConcept C42360764 @default.
• W2017103039 hasConcept C43617362 @default.
• W2017103039 hasConcept C513153333 @default.
• W2017103039 hasConcept C520434653 @default.
• W2017103039 hasConcept C540031477 @default.
• W2017103039 hasConcept C544956773 @default.
• W2017103039 hasConcept C68463220 @default.
• W2017103039 hasConceptScore W2017103039C113196181 @default.
• W2017103039 hasConceptScore W2017103039C120665830 @default.
• W2017103039 hasConceptScore W2017103039C121332964 @default.
• W2017103039 hasConceptScore W2017103039C127413603 @default.
• W2017103039 hasConceptScore W2017103039C134132462 @default.
• W2017103039 hasConceptScore W2017103039C144082473 @default.
• W2017103039 hasConceptScore W2017103039C147789679 @default.
• W2017103039 hasConceptScore W2017103039C171250308 @default.
• W2017103039 hasConceptScore W2017103039C175708663 @default.
• W2017103039 hasConceptScore W2017103039C178790620 @default.
• W2017103039 hasConceptScore W2017103039C185592680 @default.
• W2017103039 hasConceptScore W2017103039C19067145 @default.
• W2017103039 hasConceptScore W2017103039C191897082 @default.
• W2017103039 hasConceptScore W2017103039C192562407 @default.
• W2017103039 hasConceptScore W2017103039C194760766 @default.
• W2017103039 hasConceptScore W2017103039C2777431650 @default.
• W2017103039 hasConceptScore W2017103039C2779188808 @default.
• W2017103039 hasConceptScore W2017103039C2779227376 @default.
• W2017103039 hasConceptScore W2017103039C2779851234 @default.
• W2017103039 hasConceptScore W2017103039C42360764 @default.
• W2017103039 hasConceptScore W2017103039C43617362 @default.
• W2017103039 hasConceptScore W2017103039C513153333 @default.
• W2017103039 hasConceptScore W2017103039C520434653 @default.

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