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- W2017107913 endingPage "115" @default.
- W2017107913 startingPage "113" @default.
- W2017107913 abstract "We have investigated the gate oxide integrity of thermal oxides direct grown on high temperature formed Si/sub 0.3/Ge/sub 0.7/. Good oxide integrity is evidenced by the low interface-trap density of 5.9/spl times/10/sup 10/ eV/sup -1/ cm/sup -2/, low oxide charge density of -5.6/spl times/10/sup 10/ cm/sup -2/, and the small stress-induced leakage current after -3.3 V stress for 10 000 s. The good gate oxide integrity is due to the high temperature formed and strain-relaxed Si/sub 0.3/Ge/sub 0.7/ that has a original smooth surface and stable after subsequent high temperature process." @default.
- W2017107913 created "2016-06-24" @default.
- W2017107913 creator A5029554516 @default.
- W2017107913 creator A5074325217 @default.
- W2017107913 date "2000-03-01" @default.
- W2017107913 modified "2023-09-27" @default.
- W2017107913 title "Gate oxide integrity of thermal oxide grown on high temperature formed Si/sub 0.3/Ge/sub 0.7/" @default.
- W2017107913 cites W1846738067 @default.
- W2017107913 cites W1863005981 @default.
- W2017107913 cites W1970110544 @default.
- W2017107913 cites W1993173507 @default.
- W2017107913 cites W1997565420 @default.
- W2017107913 cites W2003156506 @default.
- W2017107913 cites W2017531464 @default.
- W2017107913 cites W2059788746 @default.
- W2017107913 cites W2067912189 @default.
- W2017107913 cites W2098543151 @default.
- W2017107913 cites W2104557512 @default.
- W2017107913 cites W2138811623 @default.
- W2017107913 cites W2148622817 @default.
- W2017107913 cites W2184048079 @default.
- W2017107913 cites W3033398827 @default.
- W2017107913 doi "https://doi.org/10.1109/55.823573" @default.
- W2017107913 hasPublicationYear "2000" @default.
- W2017107913 type Work @default.
- W2017107913 sameAs 2017107913 @default.
- W2017107913 citedByCount "13" @default.
- W2017107913 countsByYear W20171079132016 @default.
- W2017107913 crossrefType "journal-article" @default.
- W2017107913 hasAuthorship W2017107913A5029554516 @default.
- W2017107913 hasAuthorship W2017107913A5074325217 @default.
- W2017107913 hasConcept C113196181 @default.
- W2017107913 hasConcept C119599485 @default.
- W2017107913 hasConcept C121332964 @default.
- W2017107913 hasConcept C127413603 @default.
- W2017107913 hasConcept C138885662 @default.
- W2017107913 hasConcept C164675345 @default.
- W2017107913 hasConcept C165801399 @default.
- W2017107913 hasConcept C172385210 @default.
- W2017107913 hasConcept C185592680 @default.
- W2017107913 hasConcept C191897082 @default.
- W2017107913 hasConcept C192562407 @default.
- W2017107913 hasConcept C207740977 @default.
- W2017107913 hasConcept C21036866 @default.
- W2017107913 hasConcept C2361726 @default.
- W2017107913 hasConcept C2779851234 @default.
- W2017107913 hasConcept C41895202 @default.
- W2017107913 hasConcept C43617362 @default.
- W2017107913 hasConcept C49040817 @default.
- W2017107913 hasConcept C544956773 @default.
- W2017107913 hasConcept C550623735 @default.
- W2017107913 hasConcept C62520636 @default.
- W2017107913 hasConcept C8010536 @default.
- W2017107913 hasConceptScore W2017107913C113196181 @default.
- W2017107913 hasConceptScore W2017107913C119599485 @default.
- W2017107913 hasConceptScore W2017107913C121332964 @default.
- W2017107913 hasConceptScore W2017107913C127413603 @default.
- W2017107913 hasConceptScore W2017107913C138885662 @default.
- W2017107913 hasConceptScore W2017107913C164675345 @default.
- W2017107913 hasConceptScore W2017107913C165801399 @default.
- W2017107913 hasConceptScore W2017107913C172385210 @default.
- W2017107913 hasConceptScore W2017107913C185592680 @default.
- W2017107913 hasConceptScore W2017107913C191897082 @default.
- W2017107913 hasConceptScore W2017107913C192562407 @default.
- W2017107913 hasConceptScore W2017107913C207740977 @default.
- W2017107913 hasConceptScore W2017107913C21036866 @default.
- W2017107913 hasConceptScore W2017107913C2361726 @default.
- W2017107913 hasConceptScore W2017107913C2779851234 @default.
- W2017107913 hasConceptScore W2017107913C41895202 @default.
- W2017107913 hasConceptScore W2017107913C43617362 @default.
- W2017107913 hasConceptScore W2017107913C49040817 @default.
- W2017107913 hasConceptScore W2017107913C544956773 @default.
- W2017107913 hasConceptScore W2017107913C550623735 @default.
- W2017107913 hasConceptScore W2017107913C62520636 @default.
- W2017107913 hasConceptScore W2017107913C8010536 @default.
- W2017107913 hasIssue "3" @default.
- W2017107913 hasLocation W20171079131 @default.
- W2017107913 hasOpenAccess W2017107913 @default.
- W2017107913 hasPrimaryLocation W20171079131 @default.
- W2017107913 hasRelatedWork W1557693927 @default.
- W2017107913 hasRelatedWork W1974378933 @default.
- W2017107913 hasRelatedWork W1984933142 @default.
- W2017107913 hasRelatedWork W1990687044 @default.
- W2017107913 hasRelatedWork W2075308121 @default.
- W2017107913 hasRelatedWork W2083426990 @default.
- W2017107913 hasRelatedWork W2111278212 @default.
- W2017107913 hasRelatedWork W2170951206 @default.
- W2017107913 hasRelatedWork W2321620582 @default.
- W2017107913 hasRelatedWork W2764234652 @default.
- W2017107913 hasVolume "21" @default.
- W2017107913 isParatext "false" @default.
- W2017107913 isRetracted "false" @default.
- W2017107913 magId "2017107913" @default.
- W2017107913 workType "article" @default.