Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017110631> ?p ?o ?g. }
- W2017110631 endingPage "161" @default.
- W2017110631 startingPage "156" @default.
- W2017110631 abstract "Understanding and controlling of plasma-induced surface reactions are quite important for developing the future plasma processing including thin film deposition. We used “in-situ”, “real-time” infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS), to elucidate the mechanism of plasma-induced surface reactions during plasma enhanced chemical vapor deposition of amorphous carbon film. We examined the influence of substrate temperature on the surface reaction process, by analyzing infrared absorption spectra of Si surfaces during deposition of amorphous carbon film. We found that the deposition rate and the growth mode drastically change with varying the substrate temperature. We suggest that at low substrate temperature the film growth depends predominantly on the gas phase reaction, while at high temperature the film growth mode depends on the surface reaction as well as the gas phase reactions." @default.
- W2017110631 created "2016-06-24" @default.
- W2017110631 creator A5008898842 @default.
- W2017110631 creator A5031836628 @default.
- W2017110631 creator A5041515129 @default.
- W2017110631 creator A5042166922 @default.
- W2017110631 date "2010-01-01" @default.
- W2017110631 modified "2023-09-25" @default.
- W2017110631 title "Observation of Plasma Chemical Vapor Deposition Process of Amorphous Carbon Film" @default.
- W2017110631 cites W1491885026 @default.
- W2017110631 cites W1982743546 @default.
- W2017110631 cites W1988133629 @default.
- W2017110631 cites W2010766880 @default.
- W2017110631 cites W2020573228 @default.
- W2017110631 cites W2033289435 @default.
- W2017110631 cites W2040777891 @default.
- W2017110631 cites W2055606813 @default.
- W2017110631 cites W2063651915 @default.
- W2017110631 cites W2065676670 @default.
- W2017110631 cites W2074483612 @default.
- W2017110631 cites W2080349734 @default.
- W2017110631 cites W2081796675 @default.
- W2017110631 cites W2084724437 @default.
- W2017110631 cites W2091226293 @default.
- W2017110631 cites W2112312651 @default.
- W2017110631 cites W2153374567 @default.
- W2017110631 doi "https://doi.org/10.1380/jsssj.31.156" @default.
- W2017110631 hasPublicationYear "2010" @default.
- W2017110631 type Work @default.
- W2017110631 sameAs 2017110631 @default.
- W2017110631 citedByCount "0" @default.
- W2017110631 crossrefType "journal-article" @default.
- W2017110631 hasAuthorship W2017110631A5008898842 @default.
- W2017110631 hasAuthorship W2017110631A5031836628 @default.
- W2017110631 hasAuthorship W2017110631A5041515129 @default.
- W2017110631 hasAuthorship W2017110631A5042166922 @default.
- W2017110631 hasBestOaLocation W20171106311 @default.
- W2017110631 hasConcept C111368507 @default.
- W2017110631 hasConcept C111548154 @default.
- W2017110631 hasConcept C113196181 @default.
- W2017110631 hasConcept C119824511 @default.
- W2017110631 hasConcept C120665830 @default.
- W2017110631 hasConcept C121332964 @default.
- W2017110631 hasConcept C125287762 @default.
- W2017110631 hasConcept C127313418 @default.
- W2017110631 hasConcept C127413603 @default.
- W2017110631 hasConcept C145738678 @default.
- W2017110631 hasConcept C151730666 @default.
- W2017110631 hasConcept C153642686 @default.
- W2017110631 hasConcept C159985019 @default.
- W2017110631 hasConcept C171250308 @default.
- W2017110631 hasConcept C178790620 @default.
- W2017110631 hasConcept C183866003 @default.
- W2017110631 hasConcept C185592680 @default.
- W2017110631 hasConcept C19067145 @default.
- W2017110631 hasConcept C192562407 @default.
- W2017110631 hasConcept C201931942 @default.
- W2017110631 hasConcept C2777289219 @default.
- W2017110631 hasConcept C2816523 @default.
- W2017110631 hasConcept C38347018 @default.
- W2017110631 hasConcept C42360764 @default.
- W2017110631 hasConcept C56052488 @default.
- W2017110631 hasConcept C57410435 @default.
- W2017110631 hasConcept C62520636 @default.
- W2017110631 hasConcept C64297162 @default.
- W2017110631 hasConcept C75937256 @default.
- W2017110631 hasConcept C82706917 @default.
- W2017110631 hasConcept C86803240 @default.
- W2017110631 hasConceptScore W2017110631C111368507 @default.
- W2017110631 hasConceptScore W2017110631C111548154 @default.
- W2017110631 hasConceptScore W2017110631C113196181 @default.
- W2017110631 hasConceptScore W2017110631C119824511 @default.
- W2017110631 hasConceptScore W2017110631C120665830 @default.
- W2017110631 hasConceptScore W2017110631C121332964 @default.
- W2017110631 hasConceptScore W2017110631C125287762 @default.
- W2017110631 hasConceptScore W2017110631C127313418 @default.
- W2017110631 hasConceptScore W2017110631C127413603 @default.
- W2017110631 hasConceptScore W2017110631C145738678 @default.
- W2017110631 hasConceptScore W2017110631C151730666 @default.
- W2017110631 hasConceptScore W2017110631C153642686 @default.
- W2017110631 hasConceptScore W2017110631C159985019 @default.
- W2017110631 hasConceptScore W2017110631C171250308 @default.
- W2017110631 hasConceptScore W2017110631C178790620 @default.
- W2017110631 hasConceptScore W2017110631C183866003 @default.
- W2017110631 hasConceptScore W2017110631C185592680 @default.
- W2017110631 hasConceptScore W2017110631C19067145 @default.
- W2017110631 hasConceptScore W2017110631C192562407 @default.
- W2017110631 hasConceptScore W2017110631C201931942 @default.
- W2017110631 hasConceptScore W2017110631C2777289219 @default.
- W2017110631 hasConceptScore W2017110631C2816523 @default.
- W2017110631 hasConceptScore W2017110631C38347018 @default.
- W2017110631 hasConceptScore W2017110631C42360764 @default.
- W2017110631 hasConceptScore W2017110631C56052488 @default.
- W2017110631 hasConceptScore W2017110631C57410435 @default.
- W2017110631 hasConceptScore W2017110631C62520636 @default.
- W2017110631 hasConceptScore W2017110631C64297162 @default.
- W2017110631 hasConceptScore W2017110631C75937256 @default.
- W2017110631 hasConceptScore W2017110631C82706917 @default.