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- W2017111932 abstract "Three-axis accelerometers based on four separate seismic masses, each one suspended on a slanted beam, have previously been shown to have identical resolution and frequency responses in all directions. Here, a new and in-depth model of such accelerometers is presented. The theoretical model incorporates non-ideal effects such as the finite aspect ratio of the beam and the frequency-dependent squeezed gas-film damping. Sensitivity, resolution, transverse sensitivity and process errors are discussed. Prototype devices have been fabricated in a straightforward silicon process." @default.
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- W2017111932 date "2005-09-20" @default.
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- W2017111932 title "Capacitive slanted-beam three-axis accelerometer: I. Modelling and design" @default.
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- W2017111932 doi "https://doi.org/10.1088/0960-1317/15/11/001" @default.
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