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- W2017127795 abstract "Concept of asynchronous DB defects inspection machine was contrived to the purpose of reducing the price which had large scale flash memory buffer. This memory buffer was located in between reference data rendering computer and scanner; also it was located in scanner and image computer. As first step to make the concept model real, an experimental system was built which had virtual scanner." @default.
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- W2017127795 date "2010-04-29" @default.
- W2017127795 modified "2023-09-23" @default.
- W2017127795 title "Large scale flash memory system (LSFMS) for photomask defect inspection machine" @default.
- W2017127795 doi "https://doi.org/10.1117/12.864177" @default.
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