Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017134487> ?p ?o ?g. }
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- W2017134487 endingPage "236" @default.
- W2017134487 startingPage "231" @default.
- W2017134487 abstract "The design of a 10–500 MHz bridge is described and also its use with a tracking generator and spectrum analyser to form a scalar network analyser for the investigation of the internal electro-mechanical components of a parallel-plate and inductively-coupled plasma-tool. The non-invasive frequency scalar data obtained (with the plasma off) provides a frequency related registration of the internal components of the plasma-tool for given match network settings. Frequency data are presented for a parallel-plate chamber and a STS plc inductively-coupled plasma-tool as viewed via the lower electrode platen. Components identified relating to these chambers are the matching network, electrode position, wafer loading arm, wafer lift pin position and silicon wafer dislodgement. The data are used for comparing similar build configurations and fault conditions." @default.
- W2017134487 created "2016-06-24" @default.
- W2017134487 creator A5016452238 @default.
- W2017134487 creator A5018890261 @default.
- W2017134487 creator A5056157458 @default.
- W2017134487 creator A5062396389 @default.
- W2017134487 creator A5074513421 @default.
- W2017134487 creator A5078916182 @default.
- W2017134487 date "2003-11-19" @default.
- W2017134487 modified "2023-09-26" @default.
- W2017134487 title "A frequency domain measurement diagnostic technique for plasma-tools" @default.
- W2017134487 cites W1977870139 @default.
- W2017134487 cites W2035207624 @default.
- W2017134487 cites W2067566148 @default.
- W2017134487 cites W2160311980 @default.
- W2017134487 doi "https://doi.org/10.1088/0957-0233/15/1/033" @default.
- W2017134487 hasPublicationYear "2003" @default.
- W2017134487 type Work @default.
- W2017134487 sameAs 2017134487 @default.
- W2017134487 citedByCount "7" @default.
- W2017134487 countsByYear W20171344872012 @default.
- W2017134487 crossrefType "journal-article" @default.
- W2017134487 hasAuthorship W2017134487A5016452238 @default.
- W2017134487 hasAuthorship W2017134487A5018890261 @default.
- W2017134487 hasAuthorship W2017134487A5056157458 @default.
- W2017134487 hasAuthorship W2017134487A5062396389 @default.
- W2017134487 hasAuthorship W2017134487A5074513421 @default.
- W2017134487 hasAuthorship W2017134487A5078916182 @default.
- W2017134487 hasConcept C120665830 @default.
- W2017134487 hasConcept C121332964 @default.
- W2017134487 hasConcept C127413603 @default.
- W2017134487 hasConcept C160671074 @default.
- W2017134487 hasConcept C165013422 @default.
- W2017134487 hasConcept C19118579 @default.
- W2017134487 hasConcept C192562407 @default.
- W2017134487 hasConcept C24326235 @default.
- W2017134487 hasConcept C24890656 @default.
- W2017134487 hasConcept C26834552 @default.
- W2017134487 hasConcept C31972630 @default.
- W2017134487 hasConcept C41008148 @default.
- W2017134487 hasConcept C49040817 @default.
- W2017134487 hasConcept C62520636 @default.
- W2017134487 hasConcept C82706917 @default.
- W2017134487 hasConceptScore W2017134487C120665830 @default.
- W2017134487 hasConceptScore W2017134487C121332964 @default.
- W2017134487 hasConceptScore W2017134487C127413603 @default.
- W2017134487 hasConceptScore W2017134487C160671074 @default.
- W2017134487 hasConceptScore W2017134487C165013422 @default.
- W2017134487 hasConceptScore W2017134487C19118579 @default.
- W2017134487 hasConceptScore W2017134487C192562407 @default.
- W2017134487 hasConceptScore W2017134487C24326235 @default.
- W2017134487 hasConceptScore W2017134487C24890656 @default.
- W2017134487 hasConceptScore W2017134487C26834552 @default.
- W2017134487 hasConceptScore W2017134487C31972630 @default.
- W2017134487 hasConceptScore W2017134487C41008148 @default.
- W2017134487 hasConceptScore W2017134487C49040817 @default.
- W2017134487 hasConceptScore W2017134487C62520636 @default.
- W2017134487 hasConceptScore W2017134487C82706917 @default.
- W2017134487 hasIssue "1" @default.
- W2017134487 hasLocation W20171344871 @default.
- W2017134487 hasOpenAccess W2017134487 @default.
- W2017134487 hasPrimaryLocation W20171344871 @default.
- W2017134487 hasRelatedWork W1662471680 @default.
- W2017134487 hasRelatedWork W2004857665 @default.
- W2017134487 hasRelatedWork W2017722595 @default.
- W2017134487 hasRelatedWork W2899084033 @default.
- W2017134487 hasRelatedWork W293942573 @default.
- W2017134487 hasRelatedWork W2970266003 @default.
- W2017134487 hasRelatedWork W327425532 @default.
- W2017134487 hasRelatedWork W4213132161 @default.
- W2017134487 hasRelatedWork W4281685712 @default.
- W2017134487 hasRelatedWork W2130884582 @default.
- W2017134487 hasVolume "15" @default.
- W2017134487 isParatext "false" @default.
- W2017134487 isRetracted "false" @default.
- W2017134487 magId "2017134487" @default.
- W2017134487 workType "article" @default.