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• W2017136220 endingPage "697" @default.
• W2017136220 startingPage "683" @default.
• W2017136220 abstract "Abstract The use of CVD diamond in electronics has very stringent requirements. For a CVD diamond industry to become viable it is mandatory to obtain very large growth rates (> 5 µm/h), all the while maintaining extremely high purity, a crystalline defect density as low as possible, and large usable surface areas. At the same time, one must keep the stress level within the growing crystal below acceptable limits to avoid crack formation and preserve the crystal structural integrity. These imperatives imply to work to improve both the plasma deposition process and the CVD diamond crystal growth. In this paper, we propose a three-pronged approach: (i) We use detailed plasma models to establish the influence of process parameters (in particular deposition pressure) on plasma chemistry in order to optimize film growth rate and diamond quality; (ii) We emphasize the need for careful substrate pre-treatment and selection (including choosing a single-sector face) to minimize defects in the growing films; (iii) We employ a 3D geometrical model to predict the crystal shape under given growth conditions, and exploit this knowledge to devise a growth strategy maximizing the usable film surface area while minimizing stresses inside the films." @default.
• W2017136220 created "2016-06-24" @default.
• W2017136220 creator A5012609449 @default.
• W2017136220 creator A5032836667 @default.
• W2017136220 creator A5041549134 @default.
• W2017136220 creator A5043679091 @default.
• W2017136220 creator A5056155860 @default.
• W2017136220 creator A5073725759 @default.
• W2017136220 creator A5084766838 @default.
• W2017136220 creator A5091165585 @default.
• W2017136220 date "2009-05-01" @default.
• W2017136220 modified "2023-10-06" @default.
• W2017136220 title "High quality, large surface area, homoepitaxial MPACVD diamond growth" @default.
• W2017136220 cites W1665478371 @default.
• W2017136220 cites W1967551954 @default.
• W2017136220 cites W1971540314 @default.
• W2017136220 cites W1972902110 @default.
• W2017136220 cites W1977651564 @default.
• W2017136220 cites W1986947603 @default.
• W2017136220 cites W1994320852 @default.
• W2017136220 cites W1994466903 @default.
• W2017136220 cites W1996599625 @default.
• W2017136220 cites W2010887005 @default.
• W2017136220 cites W2025117348 @default.
• W2017136220 cites W2025531338 @default.
• W2017136220 cites W2026819605 @default.
• W2017136220 cites W2040330365 @default.
• W2017136220 cites W2055207477 @default.
• W2017136220 cites W2064212054 @default.
• W2017136220 cites W2065256099 @default.
• W2017136220 cites W2072040273 @default.
• W2017136220 cites W2075905033 @default.
• W2017136220 cites W2080734737 @default.
• W2017136220 cites W2081580844 @default.
• W2017136220 cites W2083965462 @default.
• W2017136220 cites W2089303792 @default.
• W2017136220 cites W2089391701 @default.
• W2017136220 cites W2140695896 @default.
• W2017136220 cites W2144644456 @default.
• W2017136220 cites W2170367361 @default.
• W2017136220 cites W2170585368 @default.
• W2017136220 cites W2313188736 @default.
• W2017136220 doi "https://doi.org/10.1016/j.diamond.2009.01.038" @default.
• W2017136220 hasPublicationYear "2009" @default.
• W2017136220 type Work @default.
• W2017136220 sameAs 2017136220 @default.
• W2017136220 citedByCount "102" @default.
• W2017136220 countsByYear W20171362202012 @default.
• W2017136220 countsByYear W20171362202013 @default.
• W2017136220 countsByYear W20171362202014 @default.
• W2017136220 countsByYear W20171362202015 @default.
• W2017136220 countsByYear W20171362202016 @default.
• W2017136220 countsByYear W20171362202017 @default.
• W2017136220 countsByYear W20171362202018 @default.
• W2017136220 countsByYear W20171362202019 @default.
• W2017136220 countsByYear W20171362202020 @default.
• W2017136220 countsByYear W20171362202021 @default.
• W2017136220 countsByYear W20171362202022 @default.
• W2017136220 countsByYear W20171362202023 @default.
• W2017136220 crossrefType "journal-article" @default.
• W2017136220 hasAuthorship W2017136220A5012609449 @default.
• W2017136220 hasAuthorship W2017136220A5032836667 @default.
• W2017136220 hasAuthorship W2017136220A5041549134 @default.
• W2017136220 hasAuthorship W2017136220A5043679091 @default.
• W2017136220 hasAuthorship W2017136220A5056155860 @default.
• W2017136220 hasAuthorship W2017136220A5073725759 @default.
• W2017136220 hasAuthorship W2017136220A5084766838 @default.
• W2017136220 hasAuthorship W2017136220A5091165585 @default.
• W2017136220 hasConcept C127313418 @default.
• W2017136220 hasConcept C171250308 @default.
• W2017136220 hasConcept C191897082 @default.
• W2017136220 hasConcept C192562407 @default.
• W2017136220 hasConcept C199289684 @default.
• W2017136220 hasConcept C2524010 @default.
• W2017136220 hasConcept C2776799497 @default.
• W2017136220 hasConcept C2776921476 @default.
• W2017136220 hasConcept C33923547 @default.
• W2017136220 hasConceptScore W2017136220C127313418 @default.
• W2017136220 hasConceptScore W2017136220C171250308 @default.
• W2017136220 hasConceptScore W2017136220C191897082 @default.
• W2017136220 hasConceptScore W2017136220C192562407 @default.
• W2017136220 hasConceptScore W2017136220C199289684 @default.
• W2017136220 hasConceptScore W2017136220C2524010 @default.
• W2017136220 hasConceptScore W2017136220C2776799497 @default.
• W2017136220 hasConceptScore W2017136220C2776921476 @default.
• W2017136220 hasConceptScore W2017136220C33923547 @default.
• W2017136220 hasIssue "5-8" @default.
• W2017136220 hasLocation W20171362201 @default.
• W2017136220 hasLocation W20171362202 @default.
• W2017136220 hasLocation W20171362203 @default.
• W2017136220 hasOpenAccess W2017136220 @default.
• W2017136220 hasPrimaryLocation W20171362201 @default.
• W2017136220 hasRelatedWork W2007306881 @default.
• W2017136220 hasRelatedWork W2029424121 @default.
• W2017136220 hasRelatedWork W2032192978 @default.
• W2017136220 hasRelatedWork W2034940851 @default.
• W2017136220 hasRelatedWork W2066676261 @default.
• W2017136220 hasRelatedWork W2090518078 @default.

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