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- W2017142357 abstract "Many works are now conducted in the worldwide scale on silicon molecular beam epitaxy (Si MBE) including homoepitaxy, doping, heteroepitaxy such as silicon/insulator, silicon/other semiconductor, and silicon/metal (silicide), and poly-Si deposition. As for device applications, work is now moving from conventional discrete devices to integrated circuits and structures unique to Si MBE. In this paper, various aspects of Si MBE are reviewed." @default.
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- W2017142357 date "1985-03-01" @default.
- W2017142357 modified "2023-10-16" @default.
- W2017142357 title "Silicon molecular beam epitaxy" @default.
- W2017142357 doi "https://doi.org/10.1116/1.583126" @default.
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