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- W2017156652 abstract "The EBIS data conversion system has been developed to be optimized for layout data of logic devices with Character Projection (CP) method. In the system, standard cells and memory cells are registered into a character database as keeping the hierarchy of cell pattern in the device pattern, so that a common CP aperture can be created for several logic devices. The order of EB shots are optimized to shorten the time of writing the patterns, small shots (sliver shots) create as few as possible, and the total number of EB shots are minimized for a specified CP aperture. The system was evaluated by processing ASIC devices of hp 180 nm, 130 nm and 90 nm nodes. The average processing time is about 1 hour with the average number of EB shots of 50 × 10<sup>6</sup> per a chip. The reduction rates of the number of shots from only conventional Variably Shaped Beam (VSB) to with CP were estimated about 80%, 45%, and 80% for the layers of front-end-of-line (FEOL), metal and via layers of back-end-of-line (BEOL), respectively." @default.
- W2017156652 created "2016-06-24" @default.
- W2017156652 creator A5001828919 @default.
- W2017156652 creator A5041793138 @default.
- W2017156652 creator A5041912903 @default.
- W2017156652 creator A5046417648 @default.
- W2017156652 creator A5065258626 @default.
- W2017156652 creator A5069321652 @default.
- W2017156652 creator A5079697546 @default.
- W2017156652 date "2006-03-10" @default.
- W2017156652 modified "2023-09-23" @default.
- W2017156652 title "Data conversion system for character projection-type low-energy electron beam direct writing system" @default.
- W2017156652 doi "https://doi.org/10.1117/12.655438" @default.
- W2017156652 hasPublicationYear "2006" @default.
- W2017156652 type Work @default.
- W2017156652 sameAs 2017156652 @default.
- W2017156652 citedByCount "0" @default.
- W2017156652 crossrefType "proceedings-article" @default.
- W2017156652 hasAuthorship W2017156652A5001828919 @default.
- W2017156652 hasAuthorship W2017156652A5041793138 @default.
- W2017156652 hasAuthorship W2017156652A5041912903 @default.
- W2017156652 hasAuthorship W2017156652A5046417648 @default.
- W2017156652 hasAuthorship W2017156652A5065258626 @default.
- W2017156652 hasAuthorship W2017156652A5069321652 @default.
- W2017156652 hasAuthorship W2017156652A5079697546 @default.
- W2017156652 hasConcept C111335779 @default.
- W2017156652 hasConcept C11413529 @default.
- W2017156652 hasConcept C120665830 @default.
- W2017156652 hasConcept C121332964 @default.
- W2017156652 hasConcept C121684516 @default.
- W2017156652 hasConcept C147120987 @default.
- W2017156652 hasConcept C165005293 @default.
- W2017156652 hasConcept C192562407 @default.
- W2017156652 hasConcept C24890656 @default.
- W2017156652 hasConcept C2524010 @default.
- W2017156652 hasConcept C2780861071 @default.
- W2017156652 hasConcept C33923547 @default.
- W2017156652 hasConcept C41008148 @default.
- W2017156652 hasConcept C57493831 @default.
- W2017156652 hasConcept C62520636 @default.
- W2017156652 hasConcept C76155785 @default.
- W2017156652 hasConcept C77390884 @default.
- W2017156652 hasConcept C78336883 @default.
- W2017156652 hasConcept C9390403 @default.
- W2017156652 hasConcept C95312477 @default.
- W2017156652 hasConceptScore W2017156652C111335779 @default.
- W2017156652 hasConceptScore W2017156652C11413529 @default.
- W2017156652 hasConceptScore W2017156652C120665830 @default.
- W2017156652 hasConceptScore W2017156652C121332964 @default.
- W2017156652 hasConceptScore W2017156652C121684516 @default.
- W2017156652 hasConceptScore W2017156652C147120987 @default.
- W2017156652 hasConceptScore W2017156652C165005293 @default.
- W2017156652 hasConceptScore W2017156652C192562407 @default.
- W2017156652 hasConceptScore W2017156652C24890656 @default.
- W2017156652 hasConceptScore W2017156652C2524010 @default.
- W2017156652 hasConceptScore W2017156652C2780861071 @default.
- W2017156652 hasConceptScore W2017156652C33923547 @default.
- W2017156652 hasConceptScore W2017156652C41008148 @default.
- W2017156652 hasConceptScore W2017156652C57493831 @default.
- W2017156652 hasConceptScore W2017156652C62520636 @default.
- W2017156652 hasConceptScore W2017156652C76155785 @default.
- W2017156652 hasConceptScore W2017156652C77390884 @default.
- W2017156652 hasConceptScore W2017156652C78336883 @default.
- W2017156652 hasConceptScore W2017156652C9390403 @default.
- W2017156652 hasConceptScore W2017156652C95312477 @default.
- W2017156652 hasLocation W20171566521 @default.
- W2017156652 hasOpenAccess W2017156652 @default.
- W2017156652 hasPrimaryLocation W20171566521 @default.
- W2017156652 hasRelatedWork W1677790289 @default.
- W2017156652 hasRelatedWork W1698641079 @default.
- W2017156652 hasRelatedWork W2014526480 @default.
- W2017156652 hasRelatedWork W2058905430 @default.
- W2017156652 hasRelatedWork W2285582634 @default.
- W2017156652 hasRelatedWork W2374497491 @default.
- W2017156652 hasRelatedWork W2390555311 @default.
- W2017156652 hasRelatedWork W2393944146 @default.
- W2017156652 hasRelatedWork W2596448771 @default.
- W2017156652 hasRelatedWork W4313034453 @default.
- W2017156652 isParatext "false" @default.
- W2017156652 isRetracted "false" @default.
- W2017156652 magId "2017156652" @default.
- W2017156652 workType "article" @default.