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- W2017160106 endingPage "3602" @default.
- W2017160106 startingPage "3598" @default.
- W2017160106 abstract "Fluorinated amorphous carbon (a-C:F) films of high fluorine content were prepared by radio-frequency (RF) bias assisted electron cyclotron resonance/chemical-vapor deposition (ECR-CVD) with a variable fluorine-to-carbon (F/C) ratio of the feed gases. The films were characterized by X-ray photoelectron spectroscopy (XPS), electron energy loss spectroscopy (EELS) and transmission electron microscopy (TEM). A low dielectric constant of around 1.5 and high dielectric strength beyond 35 MV/cm were obtained under the as-deposited and annealed conditions, respectively. The measured huge current surge and electrical conductivity of the films were discussed on the basis of the nanovoids and sp2/sp3 bonding fractions as derived from the above characterizations." @default.
- W2017160106 created "2016-06-24" @default.
- W2017160106 creator A5001623253 @default.
- W2017160106 creator A5066941110 @default.
- W2017160106 creator A5067878071 @default.
- W2017160106 date "2003-06-15" @default.
- W2017160106 modified "2023-10-18" @default.
- W2017160106 title "Structure and Electrical Studies of Fluorinated Amorphous Carbon Films Prepared by Electron Cyclotron Resonance/Chemical-Vapor Deposition" @default.
- W2017160106 cites W2000808680 @default.
- W2017160106 doi "https://doi.org/10.1143/jjap.42.3598" @default.
- W2017160106 hasPublicationYear "2003" @default.
- W2017160106 type Work @default.
- W2017160106 sameAs 2017160106 @default.
- W2017160106 citedByCount "7" @default.
- W2017160106 countsByYear W20171601062018 @default.
- W2017160106 crossrefType "journal-article" @default.
- W2017160106 hasAuthorship W2017160106A5001623253 @default.
- W2017160106 hasAuthorship W2017160106A5066941110 @default.
- W2017160106 hasAuthorship W2017160106A5067878071 @default.
- W2017160106 hasConcept C104779481 @default.
- W2017160106 hasConcept C113196181 @default.
- W2017160106 hasConcept C121332964 @default.
- W2017160106 hasConcept C133386390 @default.
- W2017160106 hasConcept C140205800 @default.
- W2017160106 hasConcept C145148216 @default.
- W2017160106 hasConcept C159985019 @default.
- W2017160106 hasConcept C171250308 @default.
- W2017160106 hasConcept C175361016 @default.
- W2017160106 hasConcept C175708663 @default.
- W2017160106 hasConcept C178790620 @default.
- W2017160106 hasConcept C185592680 @default.
- W2017160106 hasConcept C19067145 @default.
- W2017160106 hasConcept C191897082 @default.
- W2017160106 hasConcept C192562407 @default.
- W2017160106 hasConcept C201931942 @default.
- W2017160106 hasConcept C46141821 @default.
- W2017160106 hasConcept C49040817 @default.
- W2017160106 hasConcept C506198293 @default.
- W2017160106 hasConcept C56052488 @default.
- W2017160106 hasConcept C57410435 @default.
- W2017160106 hasConcept C75937256 @default.
- W2017160106 hasConcept C8010536 @default.
- W2017160106 hasConceptScore W2017160106C104779481 @default.
- W2017160106 hasConceptScore W2017160106C113196181 @default.
- W2017160106 hasConceptScore W2017160106C121332964 @default.
- W2017160106 hasConceptScore W2017160106C133386390 @default.
- W2017160106 hasConceptScore W2017160106C140205800 @default.
- W2017160106 hasConceptScore W2017160106C145148216 @default.
- W2017160106 hasConceptScore W2017160106C159985019 @default.
- W2017160106 hasConceptScore W2017160106C171250308 @default.
- W2017160106 hasConceptScore W2017160106C175361016 @default.
- W2017160106 hasConceptScore W2017160106C175708663 @default.
- W2017160106 hasConceptScore W2017160106C178790620 @default.
- W2017160106 hasConceptScore W2017160106C185592680 @default.
- W2017160106 hasConceptScore W2017160106C19067145 @default.
- W2017160106 hasConceptScore W2017160106C191897082 @default.
- W2017160106 hasConceptScore W2017160106C192562407 @default.
- W2017160106 hasConceptScore W2017160106C201931942 @default.
- W2017160106 hasConceptScore W2017160106C46141821 @default.
- W2017160106 hasConceptScore W2017160106C49040817 @default.
- W2017160106 hasConceptScore W2017160106C506198293 @default.
- W2017160106 hasConceptScore W2017160106C56052488 @default.
- W2017160106 hasConceptScore W2017160106C57410435 @default.
- W2017160106 hasConceptScore W2017160106C75937256 @default.
- W2017160106 hasConceptScore W2017160106C8010536 @default.
- W2017160106 hasIssue "Part 1, No. 6A" @default.
- W2017160106 hasLocation W20171601061 @default.
- W2017160106 hasOpenAccess W2017160106 @default.
- W2017160106 hasPrimaryLocation W20171601061 @default.
- W2017160106 hasRelatedWork W1613901355 @default.
- W2017160106 hasRelatedWork W1964525623 @default.
- W2017160106 hasRelatedWork W1988230941 @default.
- W2017160106 hasRelatedWork W2017160106 @default.
- W2017160106 hasRelatedWork W2026713371 @default.
- W2017160106 hasRelatedWork W2035025293 @default.
- W2017160106 hasRelatedWork W2059258525 @default.
- W2017160106 hasRelatedWork W2089595853 @default.
- W2017160106 hasRelatedWork W2145269894 @default.
- W2017160106 hasRelatedWork W2361156483 @default.
- W2017160106 hasVolume "42" @default.
- W2017160106 isParatext "false" @default.
- W2017160106 isRetracted "false" @default.
- W2017160106 magId "2017160106" @default.
- W2017160106 workType "article" @default.