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- W2017161853 abstract "Abstract Four aspects of the sputtering phenomenon are considered with reference to binary targets. (1) Direct energy transfer from the incident particles to surface atoms would be expected to cause an enrichment in the heavier component. (2) Energy transfer from the substrate to surface atoms would be expected to cause an enrichment in the less abundant component. (3) Effects relating to surface binding energies are most easily analyzed for alloys, the prediction being here that a target is enriched in the less volatile component. Finally, (4) effects leading to vapor pressures are considered. The actual responses of a rather large number of binary oxide and alloy targets are most simply summarized by noting the following: (a) CdO preferentially loses. O whereas ZnO does not; (b) both Al 0.33 Au 0.67 Au 0.33 preferentially lose Al. As such we conclude that preferential sputtering with oxides is understandable in terms of vapor-pressure effects, though surface binding energies in principle also play a role. By contrast, preferential effects with alloys are understandable in terms both of direct energy transfer and of surface binding energies." @default.
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- W2017161853 date "1978-02-01" @default.
- W2017161853 modified "2023-10-17" @default.
- W2017161853 title "An attempt to understand preferential sputtering" @default.
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- W2017161853 doi "https://doi.org/10.1016/0029-554x(78)90925-4" @default.
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