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- W2017181103 abstract "We present a novel fabrication method for incorporating nanometer to micrometer scale few-layer graphene (FLG) features onto substrates with electrostatic exfoliation. We pattern highly oriented pyrolytic graphite using standard lithographic techniques and subsequently, in a single step, exfoliate and transfer-print the prepatterned FLG features onto a silicon wafer using electrostatic force. We have successfully demonstrated the exfoliation/printing of 18 nm wide FLG nanolines and periodic arrays of 1.4 μm diameter pillars. Furthermore, we have fabricated graphene nanoribbon transistors using the patterned graphene nanoline. Our electrostatic force assisted exfoliation/print process does not need additional adhesion layers and could be stepped and repeated to deliver the prepatterned graphitic material over wafer-sized areas and allows the construction of graphene-based integrated circuits." @default.
- W2017181103 created "2016-06-24" @default.
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- W2017181103 date "2009-01-14" @default.
- W2017181103 modified "2023-10-16" @default.
- W2017181103 title "Electrostatic Force Assisted Exfoliation of Prepatterned Few-Layer Graphenes into Device Sites" @default.
- W2017181103 cites W1506545258 @default.
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- W2017181103 doi "https://doi.org/10.1021/nl803512z" @default.
- W2017181103 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/19072062" @default.
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