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- W2017194760 abstract "Development of the present-day technologies of manufacturing deep structures with submicron elements based on the deep x- ray lithography method with the usage of synchrotron radiation. Microelectronics used x-ray patterns with a 1.0 micrometers golden masking covering on different-type membranes become of unfit in this case both from the angle of contrast and from the standpoint of radiation and heat stability. X- ray patterns with the membrane on the base of tantalum 2 micrometers thick, that are high contrasting as to synchrotron radiation with wavelength of 0.2 to 1.0 nm, have been developed and manufactured. A set of pores 0.7 micrometers in diameter 1.5 micrometers apart in two directions was formed as the topological pattern." @default.
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- W2017194760 date "1999-06-25" @default.
- W2017194760 modified "2023-09-23" @default.
- W2017194760 title "Self-supporting tantalum masks for deep x-ray lithography with synchrotron radiation" @default.
- W2017194760 doi "https://doi.org/10.1117/12.351115" @default.
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