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- W2017204648 abstract "We demonstrate numerically that oblique off-axis illumination could enhance the contrast and extend the depth of focus of EUV phase defects detection. In addition to quantitative observation, it also allows us to extract the resolution-limited defect phase profiles quantitatively. This scheme can be easily implemented in both full field and scanning mask inspection tools." @default.
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- W2017204648 date "2015-04-06" @default.
- W2017204648 modified "2023-09-23" @default.
- W2017204648 title "Application of differential phase contrast imaging to EUV mask inspection: a numerical study" @default.
- W2017204648 cites W2103603864 @default.
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- W2017204648 doi "https://doi.org/10.1117/12.2085945" @default.
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