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- W2017209241 abstract "Polytetrafluoroethylene (PTFE, trade name Teflon) has a wide range of unique and desirable physical, electrical and chemical properties. Its tribological properties are well-suited to anti-stiction applications, and its chemical inertness commends it as a barrier and passivation layer. However, conventional thin-film techniques are not suited for depositing Teflon films on microstructures. Spin coating is impossible because of the well-known insolubility of PTFE. Plasma polymerization of fluorocarbon monomers, ion beam and rf sputtering produce PTFE films that are deficient in fluorine. Pulsed laser deposition (PLD) using excimer and Ti:sapphire lasers is unsatisfactory because UV or near-IR laser ablation unzips the PTFE, and requires high-temperature annealing to re-polymerize the deposited monomeric film. We have demonstrated that a completely dry, vapor-phase coating technique - resonant infrared pulsed laser deposition (RIR-PLD) at a wavelength of 8.26 μm -produces crystalline, smooth Teflon films at low process temperatures. Indeed, the films as deposited by RIR-PLD exhibit a surprising degree of crystallinity even at room temperature. The stoichiometry and local electronic structure are preserved during the laser vaporization process, as demonstrated by IR absorption and X-ray photoelectron spectroscopy. Films deposited on microscale structures show good adhesion, excellent smoothness, and a high degree of conformability to the structures. We also discuss experiments planned for the near future to compare the tribological properties of the PTFE films deposited by RIR-PLD with those of other tribological coatings. We will also discuss the implementation of RIR-PLD in practical processing schemes for MEMS applications, including the challenge in adapting existing solid-state mid-IR laser technology for this purpose." @default.
- W2017209241 created "2016-06-24" @default.
- W2017209241 creator A5062325459 @default.
- W2017209241 creator A5079739675 @default.
- W2017209241 date "2006-01-21" @default.
- W2017209241 modified "2023-09-23" @default.
- W2017209241 title "Infrared laser deposition of Teflon coatings on microstructures" @default.
- W2017209241 doi "https://doi.org/10.1117/12.647680" @default.
- W2017209241 hasPublicationYear "2006" @default.
- W2017209241 type Work @default.
- W2017209241 sameAs 2017209241 @default.
- W2017209241 citedByCount "0" @default.
- W2017209241 crossrefType "proceedings-article" @default.
- W2017209241 hasAuthorship W2017209241A5062325459 @default.
- W2017209241 hasAuthorship W2017209241A5079739675 @default.
- W2017209241 hasConcept C120665830 @default.
- W2017209241 hasConcept C121332964 @default.
- W2017209241 hasConcept C127413603 @default.
- W2017209241 hasConcept C159985019 @default.
- W2017209241 hasConcept C171250308 @default.
- W2017209241 hasConcept C175708663 @default.
- W2017209241 hasConcept C19067145 @default.
- W2017209241 hasConcept C192562407 @default.
- W2017209241 hasConcept C2780477314 @default.
- W2017209241 hasConcept C2780557906 @default.
- W2017209241 hasConcept C2780708225 @default.
- W2017209241 hasConcept C2781448156 @default.
- W2017209241 hasConcept C37982897 @default.
- W2017209241 hasConcept C42360764 @default.
- W2017209241 hasConcept C46275449 @default.
- W2017209241 hasConcept C49040817 @default.
- W2017209241 hasConcept C520434653 @default.
- W2017209241 hasConcept C521977710 @default.
- W2017209241 hasConcept C57410435 @default.
- W2017209241 hasConceptScore W2017209241C120665830 @default.
- W2017209241 hasConceptScore W2017209241C121332964 @default.
- W2017209241 hasConceptScore W2017209241C127413603 @default.
- W2017209241 hasConceptScore W2017209241C159985019 @default.
- W2017209241 hasConceptScore W2017209241C171250308 @default.
- W2017209241 hasConceptScore W2017209241C175708663 @default.
- W2017209241 hasConceptScore W2017209241C19067145 @default.
- W2017209241 hasConceptScore W2017209241C192562407 @default.
- W2017209241 hasConceptScore W2017209241C2780477314 @default.
- W2017209241 hasConceptScore W2017209241C2780557906 @default.
- W2017209241 hasConceptScore W2017209241C2780708225 @default.
- W2017209241 hasConceptScore W2017209241C2781448156 @default.
- W2017209241 hasConceptScore W2017209241C37982897 @default.
- W2017209241 hasConceptScore W2017209241C42360764 @default.
- W2017209241 hasConceptScore W2017209241C46275449 @default.
- W2017209241 hasConceptScore W2017209241C49040817 @default.
- W2017209241 hasConceptScore W2017209241C520434653 @default.
- W2017209241 hasConceptScore W2017209241C521977710 @default.
- W2017209241 hasConceptScore W2017209241C57410435 @default.
- W2017209241 hasLocation W20172092411 @default.
- W2017209241 hasOpenAccess W2017209241 @default.
- W2017209241 hasPrimaryLocation W20172092411 @default.
- W2017209241 hasRelatedWork W2006022085 @default.
- W2017209241 hasRelatedWork W2032433072 @default.
- W2017209241 hasRelatedWork W2058945371 @default.
- W2017209241 hasRelatedWork W2062560476 @default.
- W2017209241 hasRelatedWork W2136418796 @default.
- W2017209241 hasRelatedWork W2354654386 @default.
- W2017209241 hasRelatedWork W2389482125 @default.
- W2017209241 hasRelatedWork W2514979867 @default.
- W2017209241 hasRelatedWork W2765099756 @default.
- W2017209241 hasRelatedWork W290886756 @default.
- W2017209241 isParatext "false" @default.
- W2017209241 isRetracted "false" @default.
- W2017209241 magId "2017209241" @default.
- W2017209241 workType "article" @default.