Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017211040> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2017211040 abstract "We investigated the effect of surfactant-added rinse and soft bake conditions on the pattern collapse in sub-100nm ArF lithography. Pattern collapse was estimated by comparing the critical dimension (CD) and the frequency at which collapse occurred. Collapse could be improved by using surfactant solutions, but the extent was different from the model study concerning the contact angle and surface tension at equilibrium state only. From dynamic surface tension data, we found that surface tension in dynamic mode was more important than that in static mode when spin drying method was used. During the study we found that pattern collapse occurred much easily at the edge of wafer. By increasing bake time or temperature after resist coating, we could decrease the positional difference in the pattern collapse. It is supposed that these results come from the relaxation of internal stress in resist during spin coating" @default.
- W2017211040 created "2016-06-24" @default.
- W2017211040 creator A5008383067 @default.
- W2017211040 creator A5013399712 @default.
- W2017211040 creator A5037238318 @default.
- W2017211040 creator A5053075425 @default.
- W2017211040 creator A5061761135 @default.
- W2017211040 creator A5071711536 @default.
- W2017211040 date "2003-06-11" @default.
- W2017211040 modified "2023-09-23" @default.
- W2017211040 title "Improvement of pattern collapse in sub-100 nm nodes" @default.
- W2017211040 doi "https://doi.org/10.1117/12.485115" @default.
- W2017211040 hasPublicationYear "2003" @default.
- W2017211040 type Work @default.
- W2017211040 sameAs 2017211040 @default.
- W2017211040 citedByCount "4" @default.
- W2017211040 countsByYear W20172110402021 @default.
- W2017211040 crossrefType "proceedings-article" @default.
- W2017211040 hasAuthorship W2017211040A5008383067 @default.
- W2017211040 hasAuthorship W2017211040A5013399712 @default.
- W2017211040 hasAuthorship W2017211040A5037238318 @default.
- W2017211040 hasAuthorship W2017211040A5053075425 @default.
- W2017211040 hasAuthorship W2017211040A5061761135 @default.
- W2017211040 hasAuthorship W2017211040A5071711536 @default.
- W2017211040 hasConcept C112950240 @default.
- W2017211040 hasConcept C120665830 @default.
- W2017211040 hasConcept C121332964 @default.
- W2017211040 hasConcept C149912024 @default.
- W2017211040 hasConcept C15744967 @default.
- W2017211040 hasConcept C159985019 @default.
- W2017211040 hasConcept C160671074 @default.
- W2017211040 hasConcept C162307627 @default.
- W2017211040 hasConcept C171250308 @default.
- W2017211040 hasConcept C186068551 @default.
- W2017211040 hasConcept C192562407 @default.
- W2017211040 hasConcept C202974441 @default.
- W2017211040 hasConcept C204223013 @default.
- W2017211040 hasConcept C207789793 @default.
- W2017211040 hasConcept C2776029896 @default.
- W2017211040 hasConcept C2779227376 @default.
- W2017211040 hasConcept C2781448156 @default.
- W2017211040 hasConcept C41008148 @default.
- W2017211040 hasConcept C49040817 @default.
- W2017211040 hasConcept C53524968 @default.
- W2017211040 hasConcept C57879066 @default.
- W2017211040 hasConcept C58226133 @default.
- W2017211040 hasConcept C76155785 @default.
- W2017211040 hasConcept C77805123 @default.
- W2017211040 hasConcept C8892853 @default.
- W2017211040 hasConcept C97355855 @default.
- W2017211040 hasConceptScore W2017211040C112950240 @default.
- W2017211040 hasConceptScore W2017211040C120665830 @default.
- W2017211040 hasConceptScore W2017211040C121332964 @default.
- W2017211040 hasConceptScore W2017211040C149912024 @default.
- W2017211040 hasConceptScore W2017211040C15744967 @default.
- W2017211040 hasConceptScore W2017211040C159985019 @default.
- W2017211040 hasConceptScore W2017211040C160671074 @default.
- W2017211040 hasConceptScore W2017211040C162307627 @default.
- W2017211040 hasConceptScore W2017211040C171250308 @default.
- W2017211040 hasConceptScore W2017211040C186068551 @default.
- W2017211040 hasConceptScore W2017211040C192562407 @default.
- W2017211040 hasConceptScore W2017211040C202974441 @default.
- W2017211040 hasConceptScore W2017211040C204223013 @default.
- W2017211040 hasConceptScore W2017211040C207789793 @default.
- W2017211040 hasConceptScore W2017211040C2776029896 @default.
- W2017211040 hasConceptScore W2017211040C2779227376 @default.
- W2017211040 hasConceptScore W2017211040C2781448156 @default.
- W2017211040 hasConceptScore W2017211040C41008148 @default.
- W2017211040 hasConceptScore W2017211040C49040817 @default.
- W2017211040 hasConceptScore W2017211040C53524968 @default.
- W2017211040 hasConceptScore W2017211040C57879066 @default.
- W2017211040 hasConceptScore W2017211040C58226133 @default.
- W2017211040 hasConceptScore W2017211040C76155785 @default.
- W2017211040 hasConceptScore W2017211040C77805123 @default.
- W2017211040 hasConceptScore W2017211040C8892853 @default.
- W2017211040 hasConceptScore W2017211040C97355855 @default.
- W2017211040 hasLocation W20172110401 @default.
- W2017211040 hasOpenAccess W2017211040 @default.
- W2017211040 hasPrimaryLocation W20172110401 @default.
- W2017211040 hasRelatedWork W1975092938 @default.
- W2017211040 hasRelatedWork W1982266833 @default.
- W2017211040 hasRelatedWork W2008353009 @default.
- W2017211040 hasRelatedWork W2017837294 @default.
- W2017211040 hasRelatedWork W2060192655 @default.
- W2017211040 hasRelatedWork W2069371907 @default.
- W2017211040 hasRelatedWork W2073367532 @default.
- W2017211040 hasRelatedWork W2092323458 @default.
- W2017211040 hasRelatedWork W2131557656 @default.
- W2017211040 hasRelatedWork W2140862760 @default.
- W2017211040 isParatext "false" @default.
- W2017211040 isRetracted "false" @default.
- W2017211040 magId "2017211040" @default.
- W2017211040 workType "article" @default.