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• W2017223772 abstract "We built membrane-isolated transition-edge sensors (TESs) for the background-limited infrared/sub-mm spectrograph using Mo/Cu superconducting bilayer thermistors of varying geometry and found that undesired proximity effects, including the so-called longitudinal proximity effect (LoPE) and the latitudinal inverse proximity effect, affect both the superconducting transition temperature <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T</i> <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>C</sub> and the sharpness of the transition α = <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>d</i> log <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>R</i> / <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>d</i> log <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T</i> . The LoPE and latitudinal inverse proximity effect arise because of unintentional proximity effects between the bilayer thermistors, the superconducting wiring of the TES circuitry, and normal metal decorations added to mitigate the LoPE. We examined Mo/Cu bilayer films with widths of 120 μm and lengths of 5, 10, 20, 40, and 120 μm, and studied the variation of <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T</i> <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>C</sub> , α, and approximate 80% resistance per square ( <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>R</i> <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.8</sub> ) with Ti ( <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T</i> <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>C</sub> ~ 500 mK) and TiN ( <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T</i> <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>C</sub> ~ 3.8 K) wiring to the devices. We found larger α values in general for the Ti wiring, where α was as high as 90 for 20-120 μm devices and decreased to 20 for 5-μm-wide devices. We then built arrays of TESs with bilayer thermistor lengths of 10 μm, Ti contacts, TiN wiring, and Au borders. The devices were expected to demonstrate a noise equivalent power less than or equal to 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-19</sup> W/Hz <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1/2</sup> . We report a measured noise equivalent power at 87 mK of (0.95 ±0.2) × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-19</sup> W/Hz <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1/2</sup> and a response time τ of (360 ± 30)ms on our best device with a thermal conductance x <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1/2</sup> = (15 ±5)fW/K, <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T</i> <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>C</sub> = (120.5 ±3.5)mK, and stray power <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>P</i> <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>D</sub> = (135 ±85)aW. The thermistor had a value of <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>R</i> <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>N</sub> = 6 mΩ and value of α = <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>d</i> log <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>R</i> / <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>d</i> log <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>T</i> between 10 and 60 in the transition. We compare our measured performance with the performance specifications needed for ultrasensitive TESs on the Background-Limited Infrared/Sub-mm Spectrograph (BLISS) and discuss paths forward." @default.
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• W2017223772 date "2013-06-01" @default.
• W2017223772 modified "2023-10-01" @default.
• W2017223772 title "Effect of Mo/Cu Superconducting Bilayer Geometry on Ultra-Sensitive Transition-Edge Sensor Performance" @default.
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• W2017223772 doi "https://doi.org/10.1109/tasc.2012.2229375" @default.
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