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- W2017246918 abstract "Monitoring of cleanroom and spacecraft cleanliness during ground processing operations is essential in order to verify performance requirements for optical systems prior to launch. The objective is to replace manual particle counting with automated particle counting in order to reduce the processing time for the witness plates and to improve precision and accuracy of the measurements. A modified silicon wafer inspection instrument, using a HeNe laser light source, was used to count and size particles deposited on wafers exposed in the cleanrooms. The previous paper discussed measuring particles on silicon wafer witness plates during operations cleanrooms and discussed analytical methods for calculating percent area coverage. This paper describes the optical performance of the ESTEK instrument and test on the instrument." @default.
- W2017246918 created "2016-06-24" @default.
- W2017246918 creator A5012625820 @default.
- W2017246918 creator A5021015153 @default.
- W2017246918 date "1998-10-27" @default.
- W2017246918 modified "2023-09-23" @default.
- W2017246918 title "<title>Measuring particle deposition on witness surfaces using a silicon wafer scanner</title>" @default.
- W2017246918 doi "https://doi.org/10.1117/12.328487" @default.
- W2017246918 hasPublicationYear "1998" @default.
- W2017246918 type Work @default.
- W2017246918 sameAs 2017246918 @default.
- W2017246918 citedByCount "1" @default.
- W2017246918 countsByYear W20172469182012 @default.
- W2017246918 crossrefType "proceedings-article" @default.
- W2017246918 hasAuthorship W2017246918A5012625820 @default.
- W2017246918 hasAuthorship W2017246918A5021015153 @default.
- W2017246918 hasConcept C111368507 @default.
- W2017246918 hasConcept C120665830 @default.
- W2017246918 hasConcept C121332964 @default.
- W2017246918 hasConcept C127094628 @default.
- W2017246918 hasConcept C127313418 @default.
- W2017246918 hasConcept C127413603 @default.
- W2017246918 hasConcept C160671074 @default.
- W2017246918 hasConcept C171250308 @default.
- W2017246918 hasConcept C192562407 @default.
- W2017246918 hasConcept C2778517922 @default.
- W2017246918 hasConcept C2779751349 @default.
- W2017246918 hasConcept C41008148 @default.
- W2017246918 hasConcept C49040817 @default.
- W2017246918 hasConceptScore W2017246918C111368507 @default.
- W2017246918 hasConceptScore W2017246918C120665830 @default.
- W2017246918 hasConceptScore W2017246918C121332964 @default.
- W2017246918 hasConceptScore W2017246918C127094628 @default.
- W2017246918 hasConceptScore W2017246918C127313418 @default.
- W2017246918 hasConceptScore W2017246918C127413603 @default.
- W2017246918 hasConceptScore W2017246918C160671074 @default.
- W2017246918 hasConceptScore W2017246918C171250308 @default.
- W2017246918 hasConceptScore W2017246918C192562407 @default.
- W2017246918 hasConceptScore W2017246918C2778517922 @default.
- W2017246918 hasConceptScore W2017246918C2779751349 @default.
- W2017246918 hasConceptScore W2017246918C41008148 @default.
- W2017246918 hasConceptScore W2017246918C49040817 @default.
- W2017246918 hasLocation W20172469181 @default.
- W2017246918 hasOpenAccess W2017246918 @default.
- W2017246918 hasPrimaryLocation W20172469181 @default.
- W2017246918 hasRelatedWork W1542851862 @default.
- W2017246918 hasRelatedWork W1571225182 @default.
- W2017246918 hasRelatedWork W1627408909 @default.
- W2017246918 hasRelatedWork W1982318542 @default.
- W2017246918 hasRelatedWork W2019348398 @default.
- W2017246918 hasRelatedWork W2031089088 @default.
- W2017246918 hasRelatedWork W2049747187 @default.
- W2017246918 hasRelatedWork W2064634371 @default.
- W2017246918 hasRelatedWork W2070893838 @default.
- W2017246918 hasRelatedWork W2089275346 @default.
- W2017246918 hasRelatedWork W2334935297 @default.
- W2017246918 hasRelatedWork W2374523873 @default.
- W2017246918 hasRelatedWork W2597534231 @default.
- W2017246918 hasRelatedWork W3011234051 @default.
- W2017246918 hasRelatedWork W3160189461 @default.
- W2017246918 hasRelatedWork W2126767287 @default.
- W2017246918 hasRelatedWork W2278423514 @default.
- W2017246918 hasRelatedWork W2310341812 @default.
- W2017246918 hasRelatedWork W2479527889 @default.
- W2017246918 hasRelatedWork W3147105431 @default.
- W2017246918 isParatext "false" @default.
- W2017246918 isRetracted "false" @default.
- W2017246918 magId "2017246918" @default.
- W2017246918 workType "article" @default.