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- W2017248522 abstract "Nickel monosilicide (NiSi) is considered to be a promising candidate for the self-aligned silicide (SALICIDE) material of 65 nm node MOSFETs and beyond. Therefore, an accurate simulation method for the NiSi SALICIDE process is required in order to design the optimum device. We realize, for the first time, the integrated simulation with silicide topography and Schottky contact models, and propose a calibration strategy of contact resistance. In this paper, we demonstrate the accurate simulation results of the silicide both in terms of its topography and contact resistance for the NiSi SALICIDE process." @default.
- W2017248522 created "2016-06-24" @default.
- W2017248522 creator A5025364564 @default.
- W2017248522 creator A5031547943 @default.
- W2017248522 creator A5033955827 @default.
- W2017248522 creator A5047135535 @default.
- W2017248522 creator A5061183126 @default.
- W2017248522 creator A5080464054 @default.
- W2017248522 date "2003-01-01" @default.
- W2017248522 modified "2023-10-16" @default.
- W2017248522 title "Topography and Schottky contact models applied to NiSi SALICIDE process [MOSFET applications]" @default.
- W2017248522 cites W2116983885 @default.
- W2017248522 cites W2315356893 @default.
- W2017248522 doi "https://doi.org/10.1109/sispad.2003.1233637" @default.
- W2017248522 hasPublicationYear "2003" @default.
- W2017248522 type Work @default.
- W2017248522 sameAs 2017248522 @default.
- W2017248522 citedByCount "1" @default.
- W2017248522 crossrefType "proceedings-article" @default.
- W2017248522 hasAuthorship W2017248522A5025364564 @default.
- W2017248522 hasAuthorship W2017248522A5031547943 @default.
- W2017248522 hasAuthorship W2017248522A5033955827 @default.
- W2017248522 hasAuthorship W2017248522A5047135535 @default.
- W2017248522 hasAuthorship W2017248522A5061183126 @default.
- W2017248522 hasAuthorship W2017248522A5080464054 @default.
- W2017248522 hasConcept C111919701 @default.
- W2017248522 hasConcept C119599485 @default.
- W2017248522 hasConcept C123671423 @default.
- W2017248522 hasConcept C127413603 @default.
- W2017248522 hasConcept C16115445 @default.
- W2017248522 hasConcept C165801399 @default.
- W2017248522 hasConcept C171250308 @default.
- W2017248522 hasConcept C172385210 @default.
- W2017248522 hasConcept C173118649 @default.
- W2017248522 hasConcept C191897082 @default.
- W2017248522 hasConcept C192562407 @default.
- W2017248522 hasConcept C205200001 @default.
- W2017248522 hasConcept C24326235 @default.
- W2017248522 hasConcept C2776174092 @default.
- W2017248522 hasConcept C2778413303 @default.
- W2017248522 hasConcept C2779227376 @default.
- W2017248522 hasConcept C2780901251 @default.
- W2017248522 hasConcept C41008148 @default.
- W2017248522 hasConcept C49040817 @default.
- W2017248522 hasConcept C504270822 @default.
- W2017248522 hasConcept C544956773 @default.
- W2017248522 hasConcept C62611344 @default.
- W2017248522 hasConcept C66938386 @default.
- W2017248522 hasConcept C78434282 @default.
- W2017248522 hasConcept C98045186 @default.
- W2017248522 hasConceptScore W2017248522C111919701 @default.
- W2017248522 hasConceptScore W2017248522C119599485 @default.
- W2017248522 hasConceptScore W2017248522C123671423 @default.
- W2017248522 hasConceptScore W2017248522C127413603 @default.
- W2017248522 hasConceptScore W2017248522C16115445 @default.
- W2017248522 hasConceptScore W2017248522C165801399 @default.
- W2017248522 hasConceptScore W2017248522C171250308 @default.
- W2017248522 hasConceptScore W2017248522C172385210 @default.
- W2017248522 hasConceptScore W2017248522C173118649 @default.
- W2017248522 hasConceptScore W2017248522C191897082 @default.
- W2017248522 hasConceptScore W2017248522C192562407 @default.
- W2017248522 hasConceptScore W2017248522C205200001 @default.
- W2017248522 hasConceptScore W2017248522C24326235 @default.
- W2017248522 hasConceptScore W2017248522C2776174092 @default.
- W2017248522 hasConceptScore W2017248522C2778413303 @default.
- W2017248522 hasConceptScore W2017248522C2779227376 @default.
- W2017248522 hasConceptScore W2017248522C2780901251 @default.
- W2017248522 hasConceptScore W2017248522C41008148 @default.
- W2017248522 hasConceptScore W2017248522C49040817 @default.
- W2017248522 hasConceptScore W2017248522C504270822 @default.
- W2017248522 hasConceptScore W2017248522C544956773 @default.
- W2017248522 hasConceptScore W2017248522C62611344 @default.
- W2017248522 hasConceptScore W2017248522C66938386 @default.
- W2017248522 hasConceptScore W2017248522C78434282 @default.
- W2017248522 hasConceptScore W2017248522C98045186 @default.
- W2017248522 hasLocation W20172485221 @default.
- W2017248522 hasOpenAccess W2017248522 @default.
- W2017248522 hasPrimaryLocation W20172485221 @default.
- W2017248522 hasRelatedWork W1901004128 @default.
- W2017248522 hasRelatedWork W1977812439 @default.
- W2017248522 hasRelatedWork W2012409922 @default.
- W2017248522 hasRelatedWork W2012553783 @default.
- W2017248522 hasRelatedWork W2017248522 @default.
- W2017248522 hasRelatedWork W2034840008 @default.
- W2017248522 hasRelatedWork W2048985011 @default.
- W2017248522 hasRelatedWork W2124303408 @default.
- W2017248522 hasRelatedWork W2541240132 @default.
- W2017248522 hasRelatedWork W2102546410 @default.
- W2017248522 isParatext "false" @default.
- W2017248522 isRetracted "false" @default.
- W2017248522 magId "2017248522" @default.
- W2017248522 workType "article" @default.