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- W2017250730 abstract "Abstract Layered synthetic microstructures composed of alternate layers of carbon and tungsten (prepared by triode sputtering) are analysed by Auger electron spectroscopy. A superficial pollution by silica is observed. In the multilayer, an in-depth contamination by oxygen is detected: a preferential oxidation of tungsten relative to carbon is observed. The Auger depth profile presents periodic and asymmetrical C and W waves. AS LSM's were not annealed, this result is related purely to an effect of sputtering. A theoretical approach based on the overlap of Gaussian distributions is proposed and agrees fairly well with the experimental data." @default.
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- W2017250730 date "1987-04-01" @default.
- W2017250730 modified "2023-09-26" @default.
- W2017250730 title "AES sputtering depth profile analysis of C/W layered synthetic microstructures" @default.
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- W2017250730 doi "https://doi.org/10.1016/0169-4332(87)90056-0" @default.
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