Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017253896> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2017253896 abstract "The practical limits of i-line top surface imaging process using a novolak based photoresist were investigated dependent on exposure techniques such as conventional and off-axis illumination. Ultimately, quarter micron small geometry was clearly delineated and depth of focus (DOF) latitude of 1.5micrometers and 2.7micrometers was achieved respectively for 0.25micrometers and 0.30micrometers lines and spaces pattern by annular illumination of 0.50NA. To compensate proximity effect caused by pattern density, sub-resolution auxiliary pattern was firstly optimized for off- axis illumination of quadrapole and annular. As a result, critical dimension (CD) difference between dense and isolated pattern in 0.30micrometers reduced to half-level compared to that of non-auxiliary pattern. It was found that desilylation phenomenon was critically affected by the kind of photopolymer reacted with silicon source and molecular weight of silylation agent. Novolak based polymer maintained superior silylation durability to polyvinyl phenolic (PVP) resin. New silylation process concept which is dual silylation method was developed to utilize PVP's merits in the silylation process against desilylation. Dry development lithography of i-line was feasible to practical application of prototype 256 mega bit DRAM which demands 0.30micrometers patterning with a reproducibility." @default.
- W2017253896 created "2016-06-24" @default.
- W2017253896 creator A5012066024 @default.
- W2017253896 creator A5024020559 @default.
- W2017253896 creator A5032636147 @default.
- W2017253896 creator A5059606920 @default.
- W2017253896 creator A5081605668 @default.
- W2017253896 date "1994-05-16" @default.
- W2017253896 modified "2023-09-23" @default.
- W2017253896 title "Characterization of the quarter-micron i-line lithography using a top surface imaging process" @default.
- W2017253896 doi "https://doi.org/10.1117/12.175354" @default.
- W2017253896 hasPublicationYear "1994" @default.
- W2017253896 type Work @default.
- W2017253896 sameAs 2017253896 @default.
- W2017253896 citedByCount "1" @default.
- W2017253896 crossrefType "proceedings-article" @default.
- W2017253896 hasAuthorship W2017253896A5012066024 @default.
- W2017253896 hasAuthorship W2017253896A5024020559 @default.
- W2017253896 hasAuthorship W2017253896A5032636147 @default.
- W2017253896 hasAuthorship W2017253896A5059606920 @default.
- W2017253896 hasAuthorship W2017253896A5081605668 @default.
- W2017253896 hasConcept C105487726 @default.
- W2017253896 hasConcept C120665830 @default.
- W2017253896 hasConcept C121332964 @default.
- W2017253896 hasConcept C134406635 @default.
- W2017253896 hasConcept C161790260 @default.
- W2017253896 hasConcept C171250308 @default.
- W2017253896 hasConcept C178790620 @default.
- W2017253896 hasConcept C185592680 @default.
- W2017253896 hasConcept C192562407 @default.
- W2017253896 hasConcept C204223013 @default.
- W2017253896 hasConcept C207789793 @default.
- W2017253896 hasConcept C2779227376 @default.
- W2017253896 hasConcept C49040817 @default.
- W2017253896 hasConcept C5304478 @default.
- W2017253896 hasConceptScore W2017253896C105487726 @default.
- W2017253896 hasConceptScore W2017253896C120665830 @default.
- W2017253896 hasConceptScore W2017253896C121332964 @default.
- W2017253896 hasConceptScore W2017253896C134406635 @default.
- W2017253896 hasConceptScore W2017253896C161790260 @default.
- W2017253896 hasConceptScore W2017253896C171250308 @default.
- W2017253896 hasConceptScore W2017253896C178790620 @default.
- W2017253896 hasConceptScore W2017253896C185592680 @default.
- W2017253896 hasConceptScore W2017253896C192562407 @default.
- W2017253896 hasConceptScore W2017253896C204223013 @default.
- W2017253896 hasConceptScore W2017253896C207789793 @default.
- W2017253896 hasConceptScore W2017253896C2779227376 @default.
- W2017253896 hasConceptScore W2017253896C49040817 @default.
- W2017253896 hasConceptScore W2017253896C5304478 @default.
- W2017253896 hasLocation W20172538961 @default.
- W2017253896 hasOpenAccess W2017253896 @default.
- W2017253896 hasPrimaryLocation W20172538961 @default.
- W2017253896 hasRelatedWork W1973071557 @default.
- W2017253896 hasRelatedWork W2017253896 @default.
- W2017253896 hasRelatedWork W2035178846 @default.
- W2017253896 hasRelatedWork W2046671429 @default.
- W2017253896 hasRelatedWork W2056310104 @default.
- W2017253896 hasRelatedWork W2080447637 @default.
- W2017253896 hasRelatedWork W2109180562 @default.
- W2017253896 hasRelatedWork W2130003551 @default.
- W2017253896 hasRelatedWork W2932208872 @default.
- W2017253896 hasRelatedWork W4281622355 @default.
- W2017253896 isParatext "false" @default.
- W2017253896 isRetracted "false" @default.
- W2017253896 magId "2017253896" @default.
- W2017253896 workType "article" @default.