Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017267487> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2017267487 endingPage "5379" @default.
- W2017267487 startingPage "5379" @default.
- W2017267487 abstract "In this study, the mechanism of composition deviation of compound oxide films deposited by magnetron sputtering is examined. Composition distributions of SrTiO 3 films and SrRuO 3 films were analyzed on a substrate plane. On the area directly facing the erosion area of the target, not only were the ratios of Ti in SrTiO 3 films and Ru in SrRuO 3 films in excess of other areas, but also the amount of deposited Ti and Ru atoms was increased. The composition profiles were explained through simulations using angular distribution functions of sputtered atoms. Assuming the angular distribution of Ti in SrTiO 3 films as a summation of a homogenous fraction and a highly preferential forward direction fraction, the unique Ti composition profile is represented. This result can be interpreted as a small amount of negative metal (or metal oxide) ions that emerged from the erosion area of the target and enriched the area directly facing the erosion area. Such negative ions are one of the main origins of composition deviation." @default.
- W2017267487 created "2016-06-24" @default.
- W2017267487 creator A5013808009 @default.
- W2017267487 creator A5023558978 @default.
- W2017267487 creator A5069833444 @default.
- W2017267487 creator A5084899812 @default.
- W2017267487 date "2000-09-01" @default.
- W2017267487 modified "2023-09-26" @default.
- W2017267487 title "Composition Distribution of Compound Oxide Films Deposited by Magnetron Sputtering" @default.
- W2017267487 cites W1969589430 @default.
- W2017267487 cites W1974292101 @default.
- W2017267487 cites W1974475907 @default.
- W2017267487 cites W1976536408 @default.
- W2017267487 cites W1986295972 @default.
- W2017267487 cites W1987869495 @default.
- W2017267487 cites W2007140175 @default.
- W2017267487 cites W2013184682 @default.
- W2017267487 cites W2017030290 @default.
- W2017267487 cites W2046849948 @default.
- W2017267487 cites W2050520441 @default.
- W2017267487 cites W2052241831 @default.
- W2017267487 cites W2056239125 @default.
- W2017267487 cites W2057635866 @default.
- W2017267487 doi "https://doi.org/10.1143/jjap.39.5379" @default.
- W2017267487 hasPublicationYear "2000" @default.
- W2017267487 type Work @default.
- W2017267487 sameAs 2017267487 @default.
- W2017267487 citedByCount "5" @default.
- W2017267487 crossrefType "journal-article" @default.
- W2017267487 hasAuthorship W2017267487A5013808009 @default.
- W2017267487 hasAuthorship W2017267487A5023558978 @default.
- W2017267487 hasAuthorship W2017267487A5069833444 @default.
- W2017267487 hasAuthorship W2017267487A5084899812 @default.
- W2017267487 hasConcept C111368507 @default.
- W2017267487 hasConcept C113196181 @default.
- W2017267487 hasConcept C123408415 @default.
- W2017267487 hasConcept C127313418 @default.
- W2017267487 hasConcept C138885662 @default.
- W2017267487 hasConcept C145148216 @default.
- W2017267487 hasConcept C149849071 @default.
- W2017267487 hasConcept C171250308 @default.
- W2017267487 hasConcept C178790620 @default.
- W2017267487 hasConcept C185592680 @default.
- W2017267487 hasConcept C19067145 @default.
- W2017267487 hasConcept C191897082 @default.
- W2017267487 hasConcept C192562407 @default.
- W2017267487 hasConcept C22423302 @default.
- W2017267487 hasConcept C2777289219 @default.
- W2017267487 hasConcept C2779851234 @default.
- W2017267487 hasConcept C40231798 @default.
- W2017267487 hasConcept C41895202 @default.
- W2017267487 hasConcept C43617362 @default.
- W2017267487 hasConcept C544153396 @default.
- W2017267487 hasConcept C61427134 @default.
- W2017267487 hasConceptScore W2017267487C111368507 @default.
- W2017267487 hasConceptScore W2017267487C113196181 @default.
- W2017267487 hasConceptScore W2017267487C123408415 @default.
- W2017267487 hasConceptScore W2017267487C127313418 @default.
- W2017267487 hasConceptScore W2017267487C138885662 @default.
- W2017267487 hasConceptScore W2017267487C145148216 @default.
- W2017267487 hasConceptScore W2017267487C149849071 @default.
- W2017267487 hasConceptScore W2017267487C171250308 @default.
- W2017267487 hasConceptScore W2017267487C178790620 @default.
- W2017267487 hasConceptScore W2017267487C185592680 @default.
- W2017267487 hasConceptScore W2017267487C19067145 @default.
- W2017267487 hasConceptScore W2017267487C191897082 @default.
- W2017267487 hasConceptScore W2017267487C192562407 @default.
- W2017267487 hasConceptScore W2017267487C22423302 @default.
- W2017267487 hasConceptScore W2017267487C2777289219 @default.
- W2017267487 hasConceptScore W2017267487C2779851234 @default.
- W2017267487 hasConceptScore W2017267487C40231798 @default.
- W2017267487 hasConceptScore W2017267487C41895202 @default.
- W2017267487 hasConceptScore W2017267487C43617362 @default.
- W2017267487 hasConceptScore W2017267487C544153396 @default.
- W2017267487 hasConceptScore W2017267487C61427134 @default.
- W2017267487 hasIssue "9S" @default.
- W2017267487 hasLocation W20172674871 @default.
- W2017267487 hasOpenAccess W2017267487 @default.
- W2017267487 hasPrimaryLocation W20172674871 @default.
- W2017267487 hasRelatedWork W1968373997 @default.
- W2017267487 hasRelatedWork W1995810423 @default.
- W2017267487 hasRelatedWork W2014950863 @default.
- W2017267487 hasRelatedWork W2052710927 @default.
- W2017267487 hasRelatedWork W2062459093 @default.
- W2017267487 hasRelatedWork W2086744665 @default.
- W2017267487 hasRelatedWork W2316948141 @default.
- W2017267487 hasRelatedWork W2364045966 @default.
- W2017267487 hasRelatedWork W2373579184 @default.
- W2017267487 hasRelatedWork W2392638099 @default.
- W2017267487 hasVolume "39" @default.
- W2017267487 isParatext "false" @default.
- W2017267487 isRetracted "false" @default.
- W2017267487 magId "2017267487" @default.
- W2017267487 workType "article" @default.