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- W2017270909 abstract "The concept of Mask Error Enhancement Factor (MEEF) is introduced its impact on the future of semiconductor fabrication is explained. The effects of numerical aperture, print bias, and exposure conditions of MEEF are explored using both theoretical and experimental methods." @default.
- W2017270909 created "2016-06-24" @default.
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- W2017270909 date "2000-08-18" @default.
- W2017270909 modified "2023-10-16" @default.
- W2017270909 title "MEEF measurement and model verification for 0.3-k1 lithography" @default.
- W2017270909 doi "https://doi.org/10.1117/12.395749" @default.
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