FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017273309> ?p ?o ?g. }

• W2017273309 endingPage "1669" @default.
• W2017273309 startingPage "1657" @default.
• W2017273309 abstract "Chemical vapor deposition is widely used in integrated circuit fabrication. With the increasingly stringent requirements for product quality and yield, it is necessary to apply process monitoring, fault detection and eventually closed-loop control to the deposition process. The implementation of these tools requires an in situ sensor that can measure film properties in real time. This paper discusses an extended Kalman filter (EKF) based in situ sensor and its application in chemical vapor deposition of yttria-stabilized zirconia (YSZ) on a silicon substrate. The sensor measures reflectance from the film surface at 950 and 470 nm. The measurements were processed by the EKF to estimate film thickness, growth rate and surface roughness. The challenge with estimation of film microstructure like roughness lies in the process dynamic model for microstructure evolution at small scales, which in general is high-dimensional and nonlinear. In this work a simple but adaptive process dynamic model and a detailed optical sensor model were used to study how a simple process model could aid in estimation. Based on these models the observability of the process was discussed. The estimated film properties were verified with ex situ characterization using a scanning electron microscope (SEM) and an atomic force microscope (AFM). Finally sensitivity and robustness of EKF were discussed, along with our perspectives on future work on in situ sensing for thin film deposition." @default.
• W2017273309 created "2016-06-24" @default.
• W2017273309 creator A5006328497 @default.
• W2017273309 creator A5037841289 @default.
• W2017273309 creator A5059276733 @default.
• W2017273309 date "2006-09-01" @default.
• W2017273309 modified "2023-09-23" @default.
• W2017273309 title "An extended Kalman filter for in situ sensing of yttria-stabilized zirconia in chemical vapor deposition" @default.
• W2017273309 cites W1508264967 @default.
• W2017273309 cites W1963963452 @default.
• W2017273309 cites W1966034065 @default.
• W2017273309 cites W1968153701 @default.
• W2017273309 cites W1968224762 @default.
• W2017273309 cites W1970204731 @default.
• W2017273309 cites W1971751669 @default.
• W2017273309 cites W1973359328 @default.
• W2017273309 cites W1975030398 @default.
• W2017273309 cites W1975275687 @default.
• W2017273309 cites W1977531147 @default.
• W2017273309 cites W1979415899 @default.
• W2017273309 cites W1992505835 @default.
• W2017273309 cites W2000401286 @default.
• W2017273309 cites W2003403432 @default.
• W2017273309 cites W2005816775 @default.
• W2017273309 cites W2006204946 @default.
• W2017273309 cites W2006644469 @default.
• W2017273309 cites W2014788928 @default.
• W2017273309 cites W2017791076 @default.
• W2017273309 cites W2022064443 @default.
• W2017273309 cites W2027782836 @default.
• W2017273309 cites W2033498488 @default.
• W2017273309 cites W2041572060 @default.
• W2017273309 cites W2052946594 @default.
• W2017273309 cites W2055890555 @default.
• W2017273309 cites W2059583039 @default.
• W2017273309 cites W2059797632 @default.
• W2017273309 cites W2059983182 @default.
• W2017273309 cites W2061030265 @default.
• W2017273309 cites W2061567814 @default.
• W2017273309 cites W2062420811 @default.
• W2017273309 cites W2064249409 @default.
• W2017273309 cites W2066146644 @default.
• W2017273309 cites W2071369922 @default.
• W2017273309 cites W2074085278 @default.
• W2017273309 cites W2078815402 @default.
• W2017273309 cites W2080289145 @default.
• W2017273309 cites W2081743477 @default.
• W2017273309 cites W2095495081 @default.
• W2017273309 cites W2112882123 @default.
• W2017273309 cites W2117146274 @default.
• W2017273309 cites W2121607763 @default.
• W2017273309 cites W2121651354 @default.
• W2017273309 cites W2132500407 @default.
• W2017273309 cites W2138311207 @default.
• W2017273309 cites W2139262273 @default.
• W2017273309 cites W2142704993 @default.
• W2017273309 cites W2149622363 @default.
• W2017273309 cites W2160203169 @default.
• W2017273309 cites W2164070688 @default.
• W2017273309 cites W2165195755 @default.
• W2017273309 cites W2165243626 @default.
• W2017273309 cites W2170830375 @default.
• W2017273309 cites W2314392384 @default.
• W2017273309 doi "https://doi.org/10.1016/j.compchemeng.2006.05.032" @default.
• W2017273309 hasPublicationYear "2006" @default.
• W2017273309 type Work @default.
• W2017273309 sameAs 2017273309 @default.
• W2017273309 citedByCount "19" @default.
• W2017273309 countsByYear W20172733092013 @default.
• W2017273309 countsByYear W20172733092014 @default.
• W2017273309 countsByYear W20172733092015 @default.
• W2017273309 crossrefType "journal-article" @default.
• W2017273309 hasAuthorship W2017273309A5006328497 @default.
• W2017273309 hasAuthorship W2017273309A5037841289 @default.
• W2017273309 hasAuthorship W2017273309A5059276733 @default.
• W2017273309 hasBestOaLocation W20172733092 @default.
• W2017273309 hasConcept C107365816 @default.
• W2017273309 hasConcept C123609680 @default.
• W2017273309 hasConcept C134132462 @default.
• W2017273309 hasConcept C154945302 @default.
• W2017273309 hasConcept C157286648 @default.
• W2017273309 hasConcept C159985019 @default.
• W2017273309 hasConcept C171250308 @default.
• W2017273309 hasConcept C19067145 @default.
• W2017273309 hasConcept C192562407 @default.
• W2017273309 hasConcept C206833254 @default.
• W2017273309 hasConcept C41008148 @default.
• W2017273309 hasConcept C49040817 @default.
• W2017273309 hasConcept C96410337 @default.
• W2017273309 hasConceptScore W2017273309C107365816 @default.
• W2017273309 hasConceptScore W2017273309C123609680 @default.
• W2017273309 hasConceptScore W2017273309C134132462 @default.
• W2017273309 hasConceptScore W2017273309C154945302 @default.
• W2017273309 hasConceptScore W2017273309C157286648 @default.
• W2017273309 hasConceptScore W2017273309C159985019 @default.
• W2017273309 hasConceptScore W2017273309C171250308 @default.
• W2017273309 hasConceptScore W2017273309C19067145 @default.
• W2017273309 hasConceptScore W2017273309C192562407 @default.

• next