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• W2017278507 endingPage "N5032" @default.
• W2017278507 startingPage "N5023" @default.
• W2017278507 abstract "Current trends in semiconductor device manufacturing impose extremely stringent requirements on nanoscale processing techniques, both in terms of accurately controlling material properties and in terms of precisely controlling nanometer dimensions. To take nanostructuring by dry etching to the next level, there is a fast growing interest in so-called atomic layer etching processes, which are considered the etching counterpart of atomic layer deposition processes. In this article, past research efforts are reviewed and the key defining characteristics of atomic layer etching are identified, such as cyclic step-wise processing, self-limiting surface chemistry, and repeated removal of atomic layers (not necessarily a full monolayer) of the material. Subsequently, further parallels are drawn with the more mature and mainstream technology of atomic layer deposition from which lessons and concepts are extracted that can be beneficial for advancing the field of atomic layer etching." @default.
• W2017278507 created "2016-06-24" @default.
• W2017278507 creator A5021611388 @default.
• W2017278507 creator A5030039866 @default.
• W2017278507 creator A5058463930 @default.
• W2017278507 creator A5062788432 @default.
• W2017278507 date "2015-01-01" @default.
• W2017278507 modified "2023-09-29" @default.
• W2017278507 title "Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition?" @default.
• W2017278507 cites W1969852806 @default.
• W2017278507 cites W1972256365 @default.
• W2017278507 cites W1978527904 @default.
• W2017278507 cites W1986153207 @default.
• W2017278507 cites W1992568289 @default.
• W2017278507 cites W1994069792 @default.
• W2017278507 cites W1995191254 @default.
• W2017278507 cites W1995836054 @default.
• W2017278507 cites W1996014780 @default.
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• W2017278507 cites W1996894177 @default.
• W2017278507 cites W1997656960 @default.
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• W2017278507 cites W2000671386 @default.
• W2017278507 cites W2000904597 @default.
• W2017278507 cites W2003495098 @default.
• W2017278507 cites W2004807283 @default.
• W2017278507 cites W2006899770 @default.
• W2017278507 cites W2008464274 @default.
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• W2017278507 cites W2018412829 @default.
• W2017278507 cites W2019804329 @default.
• W2017278507 cites W2026067267 @default.
• W2017278507 cites W2029333568 @default.
• W2017278507 cites W2029554609 @default.
• W2017278507 cites W2033182420 @default.
• W2017278507 cites W2033599397 @default.
• W2017278507 cites W2036359992 @default.
• W2017278507 cites W2036550425 @default.
• W2017278507 cites W2038701336 @default.
• W2017278507 cites W2041143206 @default.
• W2017278507 cites W2044924796 @default.
• W2017278507 cites W2048389734 @default.
• W2017278507 cites W2053301477 @default.
• W2017278507 cites W2055625120 @default.
• W2017278507 cites W2057664025 @default.
• W2017278507 cites W2059997046 @default.
• W2017278507 cites W2063058287 @default.
• W2017278507 cites W2063286727 @default.
• W2017278507 cites W2067109550 @default.
• W2017278507 cites W2069100752 @default.
• W2017278507 cites W2071712090 @default.
• W2017278507 cites W2072607061 @default.
• W2017278507 cites W2092746093 @default.
• W2017278507 cites W2095169422 @default.
• W2017278507 cites W2095567118 @default.
• W2017278507 cites W2105579020 @default.
• W2017278507 cites W2111458907 @default.
• W2017278507 cites W2112588667 @default.
• W2017278507 cites W2112839302 @default.
• W2017278507 cites W2113239004 @default.
• W2017278507 cites W2114052758 @default.
• W2017278507 cites W2119253874 @default.
• W2017278507 cites W2137032131 @default.
• W2017278507 cites W2141086973 @default.
• W2017278507 cites W2148947250 @default.
• W2017278507 cites W2149248689 @default.
• W2017278507 cites W2158932701 @default.
• W2017278507 cites W2169692798 @default.
• W2017278507 cites W2319790508 @default.
• W2017278507 cites W2326313728 @default.
• W2017278507 cites W2338768700 @default.
• W2017278507 cites W4206818003 @default.
• W2017278507 cites W4254808676 @default.
• W2017278507 doi "https://doi.org/10.1149/2.0051506jss" @default.
• W2017278507 hasPublicationYear "2015" @default.
• W2017278507 type Work @default.
• W2017278507 sameAs 2017278507 @default.
• W2017278507 citedByCount "106" @default.
• W2017278507 countsByYear W20172785072015 @default.
• W2017278507 countsByYear W20172785072016 @default.
• W2017278507 countsByYear W20172785072017 @default.
• W2017278507 countsByYear W20172785072018 @default.
• W2017278507 countsByYear W20172785072019 @default.
• W2017278507 countsByYear W20172785072020 @default.
• W2017278507 countsByYear W20172785072021 @default.
• W2017278507 countsByYear W20172785072022 @default.
• W2017278507 countsByYear W20172785072023 @default.
• W2017278507 crossrefType "journal-article" @default.
• W2017278507 hasAuthorship W2017278507A5021611388 @default.
• W2017278507 hasAuthorship W2017278507A5030039866 @default.
• W2017278507 hasAuthorship W2017278507A5058463930 @default.
• W2017278507 hasAuthorship W2017278507A5062788432 @default.
• W2017278507 hasBestOaLocation W20172785071 @default.
• W2017278507 hasConcept C100460472 @default.
• W2017278507 hasConcept C121332964 @default.

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