FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017283362> ?p ?o ?g. }

• W2017283362 endingPage "289" @default.
• W2017283362 startingPage "283" @default.
• W2017283362 abstract "Laser-driven chemical reactions have been developed for thin-film microelectronics fabrication. A class of these processes relies on photochemical interactions between chemical species on surfaces and a beam of localized laser energy. This paper briefly describes the nature of such reactions and expands upon principal examples of both deposition and etching by photochemical processes. The special role of surface modifications by laser-excited reactions is emphasized." @default.
• W2017283362 created "2016-06-24" @default.
• W2017283362 creator A5004265091 @default.
• W2017283362 creator A5016448434 @default.
• W2017283362 creator A5029108154 @default.
• W2017283362 date "1987-01-01" @default.
• W2017283362 modified "2023-10-17" @default.
• W2017283362 title "Laser photochemical reactions" @default.
• W2017283362 cites W1964605122 @default.
• W2017283362 cites W1968106927 @default.
• W2017283362 cites W1970046984 @default.
• W2017283362 cites W1975268118 @default.
• W2017283362 cites W1977874574 @default.
• W2017283362 cites W1994092845 @default.
• W2017283362 cites W2010475963 @default.
• W2017283362 cites W2013076362 @default.
• W2017283362 cites W2014644623 @default.
• W2017283362 cites W2020110141 @default.
• W2017283362 cites W2031503791 @default.
• W2017283362 cites W2036705750 @default.
• W2017283362 cites W2037894543 @default.
• W2017283362 cites W2073279293 @default.
• W2017283362 doi "https://doi.org/10.1016/0304-3991(87)90237-3" @default.
• W2017283362 hasPublicationYear "1987" @default.
• W2017283362 type Work @default.
• W2017283362 sameAs 2017283362 @default.
• W2017283362 citedByCount "1" @default.
• W2017283362 countsByYear W20172833622020 @default.
• W2017283362 crossrefType "journal-article" @default.
• W2017283362 hasAuthorship W2017283362A5004265091 @default.
• W2017283362 hasAuthorship W2017283362A5016448434 @default.
• W2017283362 hasAuthorship W2017283362A5029108154 @default.
• W2017283362 hasConcept C100460472 @default.
• W2017283362 hasConcept C120665830 @default.
• W2017283362 hasConcept C121332964 @default.
• W2017283362 hasConcept C127413603 @default.
• W2017283362 hasConcept C136525101 @default.
• W2017283362 hasConcept C142724271 @default.
• W2017283362 hasConcept C151730666 @default.
• W2017283362 hasConcept C171250308 @default.
• W2017283362 hasConcept C177801218 @default.
• W2017283362 hasConcept C178790620 @default.
• W2017283362 hasConcept C181500209 @default.
• W2017283362 hasConcept C184779094 @default.
• W2017283362 hasConcept C185592680 @default.
• W2017283362 hasConcept C187937830 @default.
• W2017283362 hasConcept C192562407 @default.
• W2017283362 hasConcept C204787440 @default.
• W2017283362 hasConcept C2779227376 @default.
• W2017283362 hasConcept C2816523 @default.
• W2017283362 hasConcept C2984025587 @default.
• W2017283362 hasConcept C2993373233 @default.
• W2017283362 hasConcept C42360764 @default.
• W2017283362 hasConcept C49040817 @default.
• W2017283362 hasConcept C520434653 @default.
• W2017283362 hasConcept C64297162 @default.
• W2017283362 hasConcept C71924100 @default.
• W2017283362 hasConcept C75473681 @default.
• W2017283362 hasConcept C86803240 @default.
• W2017283362 hasConceptScore W2017283362C100460472 @default.
• W2017283362 hasConceptScore W2017283362C120665830 @default.
• W2017283362 hasConceptScore W2017283362C121332964 @default.
• W2017283362 hasConceptScore W2017283362C127413603 @default.
• W2017283362 hasConceptScore W2017283362C136525101 @default.
• W2017283362 hasConceptScore W2017283362C142724271 @default.
• W2017283362 hasConceptScore W2017283362C151730666 @default.
• W2017283362 hasConceptScore W2017283362C171250308 @default.
• W2017283362 hasConceptScore W2017283362C177801218 @default.
• W2017283362 hasConceptScore W2017283362C178790620 @default.
• W2017283362 hasConceptScore W2017283362C181500209 @default.
• W2017283362 hasConceptScore W2017283362C184779094 @default.
• W2017283362 hasConceptScore W2017283362C185592680 @default.
• W2017283362 hasConceptScore W2017283362C187937830 @default.
• W2017283362 hasConceptScore W2017283362C192562407 @default.
• W2017283362 hasConceptScore W2017283362C204787440 @default.
• W2017283362 hasConceptScore W2017283362C2779227376 @default.
• W2017283362 hasConceptScore W2017283362C2816523 @default.
• W2017283362 hasConceptScore W2017283362C2984025587 @default.
• W2017283362 hasConceptScore W2017283362C2993373233 @default.
• W2017283362 hasConceptScore W2017283362C42360764 @default.
• W2017283362 hasConceptScore W2017283362C49040817 @default.
• W2017283362 hasConceptScore W2017283362C520434653 @default.
• W2017283362 hasConceptScore W2017283362C64297162 @default.
• W2017283362 hasConceptScore W2017283362C71924100 @default.
• W2017283362 hasConceptScore W2017283362C75473681 @default.
• W2017283362 hasConceptScore W2017283362C86803240 @default.
• W2017283362 hasIssue "3-4" @default.
• W2017283362 hasLocation W20172833621 @default.
• W2017283362 hasOpenAccess W2017283362 @default.
• W2017283362 hasPrimaryLocation W20172833621 @default.
• W2017283362 hasRelatedWork W2003495719 @default.
• W2017283362 hasRelatedWork W2016931159 @default.
• W2017283362 hasRelatedWork W2017283362 @default.
• W2017283362 hasRelatedWork W2019033319 @default.
• W2017283362 hasRelatedWork W2048570745 @default.
• W2017283362 hasRelatedWork W2111531378 @default.
• W2017283362 hasRelatedWork W2275893111 @default.
• W2017283362 hasRelatedWork W2516065239 @default.

• next