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• W2017285862 endingPage "G125" @default.
• W2017285862 startingPage "G125" @default.
• W2017285862 abstract "We investigated area-selective atomic layer deposition (ALD) of zirconia using a self-assembled monolayer (SAM) and atomic force microscopy (AFM) oxidation lithography as a method of fabricating nanostructures. A SAM layer was used as a chemical mask for the ALD process, and AFM oxidation lithography was used as a nanoscale patterning tool. AFM oxidation lithography was applied to create oxide patterns on octadecyltrichlorosilane SAM-grown silicon substrates. Subsequent HF etching removed the oxide patterns locally, exposing a silicon substrate underneath. After 100 cycles of the ALD process, ALD nanostructures high and sub-100 nm wide were fabricated with no detectable Zr element outside the pattern defined by AFM oxidation lithography. The present method makes it possible to construct advanced metal-oxide-semiconductor field effect transistor and quantum confinement structures with a wide range of ALD precursor materials." @default.
• W2017285862 created "2016-06-24" @default.
• W2017285862 creator A5083471546 @default.
• W2017285862 creator A5086311475 @default.
• W2017285862 date "2009-01-01" @default.
• W2017285862 modified "2023-09-26" @default.
• W2017285862 title "Area-Selective Atomic Layer Deposition Using Self-Assembled Monolayer and Scanning Probe Lithography" @default.
• W2017285862 cites W1965368032 @default.
• W2017285862 cites W1972042025 @default.
• W2017285862 cites W1981156276 @default.
• W2017285862 cites W1983182405 @default.
• W2017285862 cites W1983574254 @default.
• W2017285862 cites W1987397621 @default.
• W2017285862 cites W2010080749 @default.
• W2017285862 cites W2012895228 @default.
• W2017285862 cites W2013646694 @default.
• W2017285862 cites W2014297484 @default.
• W2017285862 cites W2017999328 @default.
• W2017285862 cites W2025977329 @default.
• W2017285862 cites W2028118503 @default.
• W2017285862 cites W2041246757 @default.
• W2017285862 cites W2048036398 @default.
• W2017285862 cites W2056026722 @default.
• W2017285862 cites W2058323408 @default.
• W2017285862 cites W2063736406 @default.
• W2017285862 cites W2070084956 @default.
• W2017285862 cites W2083731597 @default.
• W2017285862 cites W2086788399 @default.
• W2017285862 cites W2088021557 @default.
• W2017285862 cites W2094702930 @default.
• W2017285862 doi "https://doi.org/10.1149/1.3158593" @default.
• W2017285862 hasPublicationYear "2009" @default.
• W2017285862 type Work @default.
• W2017285862 sameAs 2017285862 @default.
• W2017285862 citedByCount "26" @default.
• W2017285862 countsByYear W20172858622012 @default.
• W2017285862 countsByYear W20172858622013 @default.
• W2017285862 countsByYear W20172858622014 @default.
• W2017285862 countsByYear W20172858622015 @default.
• W2017285862 countsByYear W20172858622016 @default.
• W2017285862 countsByYear W20172858622017 @default.
• W2017285862 countsByYear W20172858622018 @default.
• W2017285862 countsByYear W20172858622020 @default.
• W2017285862 countsByYear W20172858622021 @default.
• W2017285862 countsByYear W20172858622022 @default.
• W2017285862 countsByYear W20172858622023 @default.
• W2017285862 crossrefType "journal-article" @default.
• W2017285862 hasAuthorship W2017285862A5083471546 @default.
• W2017285862 hasAuthorship W2017285862A5086311475 @default.
• W2017285862 hasConcept C100460472 @default.
• W2017285862 hasConcept C111368507 @default.
• W2017285862 hasConcept C127313418 @default.
• W2017285862 hasConcept C136525101 @default.
• W2017285862 hasConcept C142724271 @default.
• W2017285862 hasConcept C171250308 @default.
• W2017285862 hasConcept C186187911 @default.
• W2017285862 hasConcept C192562407 @default.
• W2017285862 hasConcept C204223013 @default.
• W2017285862 hasConcept C204787440 @default.
• W2017285862 hasConcept C2777289219 @default.
• W2017285862 hasConcept C2778645564 @default.
• W2017285862 hasConcept C2779227376 @default.
• W2017285862 hasConcept C43766710 @default.
• W2017285862 hasConcept C49040817 @default.
• W2017285862 hasConcept C544956773 @default.
• W2017285862 hasConcept C69544855 @default.
• W2017285862 hasConcept C7070889 @default.
• W2017285862 hasConcept C71924100 @default.
• W2017285862 hasConceptScore W2017285862C100460472 @default.
• W2017285862 hasConceptScore W2017285862C111368507 @default.
• W2017285862 hasConceptScore W2017285862C127313418 @default.
• W2017285862 hasConceptScore W2017285862C136525101 @default.
• W2017285862 hasConceptScore W2017285862C142724271 @default.
• W2017285862 hasConceptScore W2017285862C171250308 @default.
• W2017285862 hasConceptScore W2017285862C186187911 @default.
• W2017285862 hasConceptScore W2017285862C192562407 @default.
• W2017285862 hasConceptScore W2017285862C204223013 @default.
• W2017285862 hasConceptScore W2017285862C204787440 @default.
• W2017285862 hasConceptScore W2017285862C2777289219 @default.
• W2017285862 hasConceptScore W2017285862C2778645564 @default.
• W2017285862 hasConceptScore W2017285862C2779227376 @default.
• W2017285862 hasConceptScore W2017285862C43766710 @default.
• W2017285862 hasConceptScore W2017285862C49040817 @default.
• W2017285862 hasConceptScore W2017285862C544956773 @default.
• W2017285862 hasConceptScore W2017285862C69544855 @default.
• W2017285862 hasConceptScore W2017285862C7070889 @default.
• W2017285862 hasConceptScore W2017285862C71924100 @default.
• W2017285862 hasIssue "9" @default.
• W2017285862 hasLocation W20172858621 @default.
• W2017285862 hasOpenAccess W2017285862 @default.
• W2017285862 hasPrimaryLocation W20172858621 @default.
• W2017285862 hasRelatedWork W1967627355 @default.
• W2017285862 hasRelatedWork W1981588863 @default.
• W2017285862 hasRelatedWork W2029845838 @default.
• W2017285862 hasRelatedWork W2044079975 @default.
• W2017285862 hasRelatedWork W2055988339 @default.
• W2017285862 hasRelatedWork W2071505348 @default.
• W2017285862 hasRelatedWork W2091210967 @default.

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