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- W2017340424 abstract "We show that contact between encapsulated MEMS devices and the bare silicon surrounding sidewalls generally results in a reversible adhesion with a consistent adhesion force. This force is small enough (25 mN) to be overcome by the restoring force of the springs in inertial sensors with resonant frequency above 4 kHz. Therefore, it should be possible to design and build stiction-free inertial sensors in this process - a significant advantage over approaches that rely on deposition, tuning and maintenance of chemical coatings for inertial sensors." @default.
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- W2017340424 date "2014-01-01" @default.
- W2017340424 modified "2023-10-15" @default.
- W2017340424 title "Characterization of stiction forces in ultra-clean encapsulated MEMS devices" @default.
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- W2017340424 doi "https://doi.org/10.1109/memsys.2014.6765709" @default.
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