Matches in SemOpenAlex for { <https://semopenalex.org/work/W2017357557> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2017357557 abstract "The normal process to fabricate an x-ray mask involves two steps: make an optical mask by using an optical pattern generator (OPG), and form the pattern on the x-ray mask membrane with the optical mask by UV lithography. The sole function of the optical mask is the pattern transfer from source to target. It is always possible that pattern distortion would happen during its transference. In this paper we present a new process to fabricate deep x-ray lithography (DXRL) mask by direct pattern writing on the first layer of resist of an x-ray mask membrane. A thin layer of gold (1 ~ 2 μm) is deposited on the revealed plating base of the membrane and serves as the absorber for a following x- ray exposure of the second (thicker) layer of resist. Finally a thick (5-10 μm) gold layer is plated in the stencil formed by developed second layer of resist. This process has been demonstrated with Kapton membranes (Polyimide foil). The principle of the process can be applied to other x-ray mask membrane materials and to make ultra deep x-ray lithography (UDXRL) mask as well. In this paper the initial results of the new process are presented. The performance of the fabricated mask is evaluated and the alternative approaches will be discussed." @default.
- W2017357557 created "2016-06-24" @default.
- W2017357557 creator A5000806359 @default.
- W2017357557 creator A5008918562 @default.
- W2017357557 creator A5021502269 @default.
- W2017357557 date "2003-01-25" @default.
- W2017357557 modified "2023-09-23" @default.
- W2017357557 title "New process to fabricate DXRL x-ray mask by direct pattern writing" @default.
- W2017357557 doi "https://doi.org/10.1117/12.478253" @default.
- W2017357557 hasPublicationYear "2003" @default.
- W2017357557 type Work @default.
- W2017357557 sameAs 2017357557 @default.
- W2017357557 citedByCount "0" @default.
- W2017357557 crossrefType "proceedings-article" @default.
- W2017357557 hasAuthorship W2017357557A5000806359 @default.
- W2017357557 hasAuthorship W2017357557A5008918562 @default.
- W2017357557 hasAuthorship W2017357557A5021502269 @default.
- W2017357557 hasConcept C105487726 @default.
- W2017357557 hasConcept C120665830 @default.
- W2017357557 hasConcept C121332964 @default.
- W2017357557 hasConcept C134406635 @default.
- W2017357557 hasConcept C136525101 @default.
- W2017357557 hasConcept C142724271 @default.
- W2017357557 hasConcept C145695476 @default.
- W2017357557 hasConcept C171250308 @default.
- W2017357557 hasConcept C192562407 @default.
- W2017357557 hasConcept C204223013 @default.
- W2017357557 hasConcept C204787440 @default.
- W2017357557 hasConcept C2779227376 @default.
- W2017357557 hasConcept C2780965675 @default.
- W2017357557 hasConcept C41794268 @default.
- W2017357557 hasConcept C45889518 @default.
- W2017357557 hasConcept C49040817 @default.
- W2017357557 hasConcept C53524968 @default.
- W2017357557 hasConcept C71924100 @default.
- W2017357557 hasConceptScore W2017357557C105487726 @default.
- W2017357557 hasConceptScore W2017357557C120665830 @default.
- W2017357557 hasConceptScore W2017357557C121332964 @default.
- W2017357557 hasConceptScore W2017357557C134406635 @default.
- W2017357557 hasConceptScore W2017357557C136525101 @default.
- W2017357557 hasConceptScore W2017357557C142724271 @default.
- W2017357557 hasConceptScore W2017357557C145695476 @default.
- W2017357557 hasConceptScore W2017357557C171250308 @default.
- W2017357557 hasConceptScore W2017357557C192562407 @default.
- W2017357557 hasConceptScore W2017357557C204223013 @default.
- W2017357557 hasConceptScore W2017357557C204787440 @default.
- W2017357557 hasConceptScore W2017357557C2779227376 @default.
- W2017357557 hasConceptScore W2017357557C2780965675 @default.
- W2017357557 hasConceptScore W2017357557C41794268 @default.
- W2017357557 hasConceptScore W2017357557C45889518 @default.
- W2017357557 hasConceptScore W2017357557C49040817 @default.
- W2017357557 hasConceptScore W2017357557C53524968 @default.
- W2017357557 hasConceptScore W2017357557C71924100 @default.
- W2017357557 hasLocation W20173575571 @default.
- W2017357557 hasOpenAccess W2017357557 @default.
- W2017357557 hasPrimaryLocation W20173575571 @default.
- W2017357557 hasRelatedWork W1974876551 @default.
- W2017357557 hasRelatedWork W1975156481 @default.
- W2017357557 hasRelatedWork W1976663320 @default.
- W2017357557 hasRelatedWork W1979271782 @default.
- W2017357557 hasRelatedWork W1998874524 @default.
- W2017357557 hasRelatedWork W2017357557 @default.
- W2017357557 hasRelatedWork W2026310675 @default.
- W2017357557 hasRelatedWork W2044386508 @default.
- W2017357557 hasRelatedWork W2100594860 @default.
- W2017357557 hasRelatedWork W3007549791 @default.
- W2017357557 isParatext "false" @default.
- W2017357557 isRetracted "false" @default.
- W2017357557 magId "2017357557" @default.
- W2017357557 workType "article" @default.