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- W2017367316 abstract "Reduction of threading screw dislocation without polytype transformation from 4H-SiC was performed by the combination of step-flow growth and spiral growth. On a vicinal 4H-SiC seed crystal, threading screw dislocations are converted to Frank-type stacking faults by step-flow during solution growth. As the growth proceeds, the defects are excluded to the crystal. Thus utilizing the conversion, high quality SiC crystal growth without threading screw dislocations is expected to achieve. However, at the same time, polytype transformation is caused by the occurrence of 2D nucleation. By using the special shape of seed crystal, we successfully grew high quality 4H-SiC crystal without threading screw dislocation and polytype transformation." @default.
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- W2017367316 date "2013-01-01" @default.
- W2017367316 modified "2023-09-23" @default.
- W2017367316 title "Reduction of Threading Screw Dislocation Utilizing Defect Conversion during Solution Growth of 4H-SiC" @default.
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- W2017367316 doi "https://doi.org/10.4028/www.scientific.net/msf.740-742.189" @default.
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